Ellipsometer Horiba
Description
Measurement of the thickness and refractive index of dielectric, semiconductor or organic layers and of multilayer structures
Manufacturer and model
Horiba UVISEL Plus
Technical specifications
- Spectral range : 190 - 2100 nm
- Adjustable angle from 40° to 90° by step of 0.01°
- Motorized XY sample stage 200mm x 200mm for mapping
- Transmission at 90° measurements
- 3 spot sizes : 0.05,0.1 and 1 mm à 90°
- Imagery camera
Examples of available processes
- Thickness measurement of thin layers (dielectrics, semiconductors ...)
- Optical properties measurement of thin layers (refractive index, absorption coefficient, optical gap, etc.)
- Surfaces characterization