Contactless conductivity probe
![Contactless conductivity probe](/3it/fileadmin/_processed_/9/4/csm_appareil_mesure_conductivite_sans_contact_458a5796f6.jpg)
Description
Contactless electrical conductivity measurements
Manufacturer & Model
Semilab LEI88
Technical specifications
- Non-destructive
- Fast, accurate measurements of sheet conductance / sheet resistance
- Nominal sample thickness range of 450 to 800 microns
- Nominal coil gap (>/= 0.35”/0.899 mm)
- Coil size: 0.56” (14mm)
- Max. Wafer size: 6” (150mm)
- Hi-range: sheet resistance 16 - 3,200 Ω/sq.
Available processes
Conductivity measurement of wafers or thin layers