Surface treatment
- Ion implantation Varian CF3000
- Apollo Instrument 980nm IR Laser - S150-980-½C sn20100447
- Q-Mark 1064nm IR laser
- Lumonics 193nm UV Laser - PM-846 ArF sn: E040002
- Lumonics 248nm UV Laser - PM-846
- Tegal Corporation Oxygen Plasma Cleaning System - Plasmaline 415
- Chemical mechanical planarization - CMP
- Novascan Ozone Surface Cleaning System - PSD-UVT