DUV Flooder
Description
Exposition DUV device (distant ultraviolet) without a photolithographic mask alignment system for illumination on all substrates
Manufacturer and model
OAI- Optical Associates Inc.- OAI 2000W UV-Flooder
Technical specifications
- UV light source 2000W with DUV wavelength 250nm
- Substrate max diameter : 4 in
Examples of available processes
- Hybrid process: Step of PMMA resin expositon (electrosensitive resin, but also photosensitive to DUV, not UV) masked by photoresist in a lithographic process combining photolitho and electrolitho for greater efficiency
- Other DUV Exhibition