Rapid Thermal Annealing (RTA)

Description

Heat treatment of samples

Manufacturer and model

JIPELEC - JetFirst

Technical specifications

• Heating with halogen lamps (12)
• Maximum power: 30 kW
• Maximum temperature: 900 ° C in thermocouple mode
• Maximum temperature: 1050 ° C in pyrometer mode
• Maximum substrate diameter: 4 , compatible with small samples
• Piloted by PC, thermal cycle recipes defined by the user and comprising up to 30 steps, acquisition of data during the processes
• 4 gas lines for annealing under controlled atmosphere: (1) N₂, (2) hydrogen gas forming gas (N₂: H₂ 90:10), (3) oxygen, (4) Argon

Examples of available processes

• Interdiffusion of quantum wells
• Diffusion of metallizations for electrical contacts