Tylan furnace

Description

Oxidation, annealing and LPCVD deposition

Manufacturer and model

Tylan - Tytan

Technical specifications

• 4 tubes
• Wafer size : 3-4 inches (6 inches possible)

Examples of available processes

• tube#1 : dry oxidation - gate oxide
• tube#2 : dry/wet oxidation - field oxide
• tube#3 : LPCVD (polysilicon)
• tube#4 : LPCVD (nitrid)