Matériaux déposés
Voir les listes détaillée des matériaux déposés
| Matériau | Méthode | Équipement | Épaisseur Min (nm) | Épaisseur Max (nm) |
| Ag | PVD | SPT320 | 10 | 500 |
| Ag | Placage-Électrolytique | Banc humide placage | 100 | 6000 |
| Ag | PVD | Intelvac | 200 | 600 |
| Ag | Evap | intelvac e-beam | 20 | 9000 |
| Al | Evap | Auto-306 | 5 | 900 |
| Al | PVD | SPT320 | 5 | 1000 |
| Al | PVD | Auto-500 | ||
| Al | Evap | Angstrom | ||
| Al | PVD | Intelvac | 500 | 1000 |
| Al | Evap | Intelvac e-beam | 100 | 6000 |
| Al2O3 | PVD | SPT320 | 20 | 500 |
| Al2O3 | PVD | Intelvac | 50 | 100 |
| Al2O3 | Evap | intelvac e-beam | 20 | 200 |
| Al2O3 | ALD | Picosun | ||
| AlN | PVD | SPT320 | 20 | 300 |
| AlOx | Evap | Angstrom | ||
| AlSi1% | Evap | Auto-306 | 5 | 500 |
| AlSi1%Cu0,5% | PVD | SPT320 | ||
| AlSi1%Cu0,5% | Evap | Intelvac ou lesker e-beam | ||
| Au | Evap | Auto-306 | 5 | 1000 |
| Au | Placage-Électrolytique | Banc humide placage | 100 | 4000 |
| Au | Evap | Intelvac e-beam | 5 | 1000 |
| Au | Evap | lesker e-beam | 5 | 1000 |
| AuGe | Evap | Intelvac ou lesker e-beam | ||
| Au-Pd 60%-40% | PVD | K550 | 2 | 10 |
| B | Evap | Intelvac e-beam | 5 | 50 |
| BPSG | PECVD | STS: MESC Multiplex | ||
| BSG | PECVD | STS: MESC Multiplex | ||
| C60 | SprayCoat | Prism BT Benchtop | ||
| Carbon Nanotubes | SprayCoat | Prism BT Benchtop | ||
| Co | PVD | Intlvac | 10 | 125 |
| Co | Evap | lesker e-beam | 20 | 80 |
| CoP | Placage-Électrolytique | Banc humide placage | 100 | 5000 |
| Cr | Evap | Auto-306 | 5 | 350 |
| Cr | PVD | Intelvac | 10 | 125 |
| Cr | Evap | Intelvac e-beam | 2 | 100 |
| Cr DC | PVD | SPT320 | 2 | 75 |
| Cr RF | PVD | SPT320 | 1 | 500 |
| Cr2O3 | PVD | SPT320 | ||
| Cu | PVD | Auto-500 | ||
| Cu | PVD | SPT320 | 20 | 2000 |
| Cu | Placage-electroless | Banc humide placage | 10 | 100000 |
| Cu | Placage-Électrolytique | Banc humide placage | 100 | 100000 |
| Cu | PVD | Intlvac | 100 | 300 |
| Cu | Evap | intlvac e-beam | 10 | 3000 |
| Fe | Evap | Intlvac ou lesker e-beam | ||
| Fe50Co35B15 | PVD | Intlvac | 100 | 300 |
| Fe55Ni45 | Evap | Intlvac ou lesker e-beam | ||
| FeCoB | Evap | intlvac e-beam | 20 | 80 |
| FeCoB | Evap | lesker e-beam | 20 | 80 |
| Ge | Evap | Auto-306 | 5 | 100 |
| Ge | Evap | intlvac e-beam | 15 | 350 |
| GeSG | PECVD | STS: MESC Multiplex | ||
| Hf | PVD | SPT320 | ||
| HfO2 | PVD | SPT320 | 5 | 100 |
| HfO2 | Evap | Intlvac ou lesker e-beam | ||
| III-N | CBE | OSEMI inc -V1 | ||
| III-V (V= As ou P) | CBE | VG semicon - V90 | ||
| In | Evap | intlvac e-beam | 30 | 500 |
| In2O3 | PVD | SPT320 | 10 | 100 |
| InSnO2 (ITO) | Evap | Intlvac ou lesker e-beam | ||
| ITO | PVD | SPT320 | 10 | 1000 |
| ItO | PVD | Intlvac | 70 | 320 |
| ItO | Evap | Intlvac ou lesker e-beam | ||
| Mo | PVD | SPT320 | 20 | 2500 |
| Mo | Evap | intlvac e-beam | 20 | 80 |
| Nb | PVD | SPT320 | 100 | 3000 |
| Nb | Evap | Angstrom Engineering | ||
| Nb | PVD | Angstrom Engineering | ||
| Nb | Evap | Intlvac ou lesker e-beam | ||
| NbN | PVD | Angstrom Engineering | ||
| NbOx | Evap | Angstrom Engineering | ||
| Ni | Evap | Auto-306 | 5 | 500 |
| Ni | PVD | SPT320 | 20 | 1000 |
| Ni | Placage-electroless | Banc Humide placage | 10 | 50000 |
| Ni | Placage-Électrolytique | Banc Humide placage | 100 | 50000 |
| Ni | Evap | intlvac e-beam | 2 | 3500 |
| Ni80/Cr20 | Evap | intlvac e-beam | 5 | 350 |
| Ni80Fe20 | Evap | Intlvac ou lesker e-beam | ||
| Ni93/V7 | PVD | Intlvac | 50 | 300 |
| NiCr | PVD | SPT320 | 50 | 200 |
| NiCr | PVD | Intlvac | 50 | 300 |
| NiFe | Placage-Électrolytique | Banc Humide placage | 100 | 5000 |
| Pd | Evap | intlvac e-beam | 20 | 150 |
| Permalloy(80/20) | Evap | Auto-306 | 5 | 20 |
| Permalloy(80/20) | Evap | intlvac e-beam | 5 | 15 |
| Poly-Si /POL3_610 | LPCVD | Tylan - Tube 3 | 100 | 400 |
| Poly-Si /POL3_var | LPCVD | Tylan - Tube 3 | 4 | 550 |
| PSG | PECVD | STS: MESC Multiplex | ||
| Pt | Evap | Auto-306 | 5 | 20 |
| Pt | Evap | intlvac e-beam | 1 | 300 |
| Pt | Evap | lesker e-beam | 2 | 1000 |
| Sac305 | Evap | Intlvac ou lesker e-beam | ||
| Si | Evap | Auto-306 | 5 | 100 |
| Si | PVD | SPT320 | 20 | 200 |
| Si | Evap | intlvac e-beam | 15 | 350 |
| Si amorphe /HFaSi250 | PECVD | STS: MESC Multiplex | 105 | 1010 |
| Si amorphe /HFASI | PECVD | |||
| Si amorphe /AMO3_525 | LPCVD | Tylan - Tube 3 | 30 | 90 |
| SiC amorphe /HFSiC | PECVD | STS: MESC Multiplex | ||
| SiC amorphe | PECVD | STS: MESC Multiplex | ||
| silicon nanowires | SprayCoat | Prism BT Benchtop | ||
| SiN /NIT4_785 | LPCVD | Tylan - Tube 4 | 35 | |
| SiNH | PECVD | BenchMark - 800-II | ||
| SiNx /LFSiN | PECVD | STS: MESC Multiplex | 60 | 940 |
| SiNx /LFSiNST | PECVD | STS: MESC Multiplex | ||
| SiNx /HFSiN | PECVD | STS: MESC Multiplex | 135 | 800 |
| SiNx / HFSiNST | PECVD | STS: MESC Multiplex | ||
| SiNx /MFSiN | PECVD | STS: MESC Multiplex | ||
| SiNx / MFSiNST | PECVD | STS: MESC Multiplex | ||
| SiNx /HFSiN20 | PECVD | STS: MESC Multiplex | 270 | 2150 |
| SiNx /SiN Var | PECVD | STS: MESC Multiplex | ||
| SiNx | PECVD | BenchMark - 800-II | ||
| SiO2 | PVD | SPT320 | 20 | 1000 |
| SiO2 | PECVD | BenchMark - 800-II | ||
| SiO2 | PVD | Intlvac | 10 | 650 |
| SiO2 | Evap | intlvac e-beam | 15 | 350 |
| SiO2 | ALD | Picosun | ||
| SiO2- Dry / OS1_950 | Fournaise | Tylan - Tube 1 | 18 | 150 |
| SiO2- Dry / OS1_1050 | Fournaise | Tylan - Tube 1 | 18 | 150 |
| SiO2- Dry /OS2_1050 | Fournaise | Tylan - Tube 2 | 40 | 150 |
| SiO2 -Wet / OH1_1050 | Fournaise | Tylan - Tube 1 | 100 | 1000 |
| SiO2 -Wet /OH2_1050 | Fournaise | Tylan - Tube 2 | 20 | 2850 |
| SiON | PECVD | BenchMark - 800-II | ||
| SiOx /LFSiO | PECVD | STS: MESC Multiplex | 95 | 7990 |
| SiOx /LFSiOST | PECVD | STS: MESC Multiplex | ||
| SiOx /HFSiO | PECVD | STS: MESC Multiplex | 55 | 2090 |
| SiOx / HFSiOST | PECVD | STS: MESC Multiplex | ||
| Sn | Placage-electroless | Banc Humide placage | 10 | 100000 |
| Sn | Placage-Électrolytique | Banc Humide placage | 100 | 100000 |
| Sn | Evap | intlvac e-beam | 20 | 500 |
| SnAg | Placage-Électrolytique | Banc Humide placage | 100 | 100000 |
| Ta | PVD | SPT320 | 15 | 1000 |
| Ta | PVD | Intlvac | 400 | 400 |
| Ta2O5 | PVD | SPT320 | ||
| Ta37Al63 | Evap | Intlvac ou lesker e-beam | ||
| Ta5Si3 | Evap | Intlvac ou lesker e-beam | ||
| Ti | Evap | Auto-306 | 5 | 750 |
| Ti | PVD | SPT320 | 10 | 600 |
| Ti | PVD | Auto-500 | ||
| Ti | PVD | Angstrom Engineering | ||
| Ti | PVD | Intlvac | 50 | 300 |
| Ti | Evap | intlvac e-beam | 2 | 300 |
| Ti | Evap | lesker e-beam | 2 | 300 |
| Ti10W90 | PVD | Intlvac | 60 | 500 |
| TiN | PVD | SPT320 | 25 | 400 |
| TiN | PVD | Auto-500 | ||
| TiN | PVD | Angstrom Engineering | ||
| TiN | PVD | Intlvac | 10 | 400 |
| TiO2 | PVD | SPT320 | 5 | 200 |
| TiO2 | PVD | Intlvac | 100 | 100 |
| TiO2 | Evap | Intlvac ou lesker e-beam | ||
| TiOx | PVD | Angstrom Engineering | ||
| TiW | PVD | SPT320 | 80 | 800 |
| TiW | PVD | Intlvac | 10 | 400 |
| V | PVD | SPT320 | 25 | 200 |
| V | Evap | intlvac e-beam | 20 | 80 |
| Va | Evap | Intlvac ou lesker e-beam | ||
| W | PVD | SPT320 | 20 | 500 |
| W | PVD | Angstrom Engineering | ||
| W | PVD | Intlvac | 100 | 700 |
| W | Evap | intlvac e-beam | 20 | 80 |
| W | Evap | lesker e-beam | 20 | 80 |
| WOx | Evap | Angstrom Engineering | ||
| WOx | PVD | Angstrom Engineering | ||
| Y | Evap | intlvac e-beam | 2 | 100 |
| ???? | APCVD | Carbolite | ||
| Zn | Evap | Intlvac ou lesker e-beam | ||
| ZnO | Evap | Intlvac ou lesker e-beam | ||
| ZnS | Evap | Intlvac ou lesker e-beam | ||
| ZrO2 | PVD | SPT320 |