Dominique Drouin
Professeur, Faculté de génie
FAC. GÉNIE Électrique et informatique
Présentation
Sujet de recherche
Micro and Nanoelectronics, Nanomaterials
Disciplines de recherche
Electrical Engineering and Electronic Engineering
Mots-clés
Microelectronic packaging, Neuromorphic computing, Machine learning, Electron beam lithography, FDSOI pH/gas sensor, Monte carlo simulation, Non volatile memory, Single electron transistor, Si spin qubit
Langues parlées et écrites
Anglais, Français
Diplômes
(1998). (Post-doctorate, n.a.). University of Technology, Sydney.
(1998). (Doctorate, Doctorate of Engineering). Université de Sherbrooke.
(1994). (Bachelor's, Electrical engineering). Université de Sherbrooke.
Titres de compétence
Ingénieur.
Prix et distinctions
- (2028) Synergy. Natural Sciences and Engineering Research Council of Canada (NSERC). (Prize / Award).
- (2009) Prix 2009 MAS K.F.J. Heinrich Award. Microbeam Analysis Society. (Distinction).
Financement
- Grant. (Under Review). Co-applicant. Canadian Transmon Source. Natural Sciences and Engineering Research Council of Canada (NSERC). Alliance Quantum Consortium. 5 000 000 $. (2024-2029)
- Grant. (Awarded). Co-applicant. Large scale production of high performance infrared imaging sensors - Synergy Award. Natural Sciences and Engineering Research Council of Canada (NSERC). Synergy Award. 200 000 $. (2018-2028)
- Grant. (Awarded). Co-applicant. Consortium on Quantum Simulation with Spin Qubits (CQS2Q). Natural Sciences and Engineering Research Council of Canada (NSERC). Alliance Grants - Consortia Quantum - Coordinated research and innovation. 4 925 000 $. (2023-2028)
- Grant. (Awarded). Principal Applicant. CMOS-OxRAM integrated circuits for low-power AI and cryogenic quantum dot auto-tuning. Natural Sciences and Engineering Research Council of Canada (NSERC). Alliance Grants - Quantum - Strengthening Capacity. 659 000 $. (2023-2026)
- Grant. (Awarded). Co-applicant. A versatile multi-project cleanroom fabrication process for superconducting quantum circuits. Natural Sciences and Engineering Research Council of Canada (NSERC). Angstrom Engineering. Alliance. 30 000 $. (2023-2026)
- Grant. (Awarded). Co-applicant. Distributed Digital Intelligence Network (D2IN): Development of disruptive andlow-cost microsystems for edge computing. Canada Foundation for Innovation (CFI). Ministere de l'education et de l'enseignement supérieur. Canadian Innovation Fund. 6 699 774 $. (2021-2025)
- Grant. (Awarded). Principal Applicant. Development of novel quantum vacuum-based electronic devices platform and enabling its microfabrication methods. Natural Sciences and Engineering Research Council of Canada (NSERC). Infinite Potential Laboratory. Alliance. 769 504 $. (2022-2025)
- Grant. (Awarded). Principal Applicant. Multi-user and low-cost silicon interposer platform for bio/quantum systems. Natural Sciences and Engineering Research Council of Canada (NSERC). CMC Microsystems. Alliance. 302 079 $. (2022-2025)
- Grant. (Awarded). Co-applicant. Canada-UK Quantum Technologies call: Advanced Manufacturing Toolkit for Quantum Sensing and Quantum Computing. Natural Sciences and Engineering Research Council of Canada (NSERC). Nord Quantique. Alliance Canada-UK innitiative. 28 000 $. (2021-2024)
- Grant. (Awarded). Co-applicant. Materials and Processes for Improved Photonic Package Stability. Natural Sciences and Engineering Research Council of Canada (NSERC). Alliance grant. 200 000 $. (2022-2024)
- Grant. (Awarded). Co-applicant. Agrandissement de l’Institut interdisciplinaire d’innovation technologique et achat d’équipements scientifiques pour la Chaine d’Innovation Intégrée. Micro Innovation Collaborative Center (C2MI). Programme de soutien aux organismes de recherche et d’innovation, volet 4. 2 511 000 $. (2021-2024)
- Grant. (Awarded). Principal Applicant. Enabling large-scale silicon spin qubit platform using memristor-based neuromorphic circuits for quantum dots auto-tuning. Natural Sciences and Engineering Research Council of Canada (NSERC). Discovery Grant. 320 000 $. (2019-2024)
- Grant. (Awarded). Principal Applicant. Hardware implementation of spiking neural networks based on hybrid CMOS-memristors circuits for ultralow-power artificial intelligence at the edge. Fonds de recherche du Québec - Nature et technologies (FRQNT). Projet de recherche en équipe. 199 620 $. (2021-2024)
- Research Chair. (Awarded). Principal Investigator. NSERC/IBM Industrial Research Chair in High-Performance Heterogeneous Integration. University of Sherbrooke. Industrial Research Chair. 125 000 $. (2019-2024)
- Grant. (Awarded). Collaborator. QSciTech: Bridging the Gap between Quantum Science and Quantum Technologies - Training the Next Generation of Quantum Scientists, Engineers and Entrepreneurs. Natural Sciences and Engineering Research Council of Canada (NSERC). Collaborative Research and Training Experience. 1 650 $. (2018-2024)
- Grant. (Awarded). Co-applicant. Novel solder structures for high reliability flip chip applications - Scaling to high-density applications". Natural Sciences and Engineering Research Council of Canada (NSERC). Idea to Innovation (I2IPJ). 125 000 $. (2022-2023)
- Grant. (Awarded). Principal Applicant. Advanced interconnects manufacturing toolbox for the Integrated Innovation Chain. Mathematics of Information Technology and Complex Systems (MITACS). Collaborative Microelectronic Innovation Center. Accelerate. 165 000 $. (2021-2022)
- Grant. (Awarded). Principal Applicant. Unsupervised spiking neural networks with analog memristive devices for edge computing. Agence nationale de la recherche (ANR) (France). Narodowe Centrum Nauki (Poland). Chist-Era. 322 192 $. (2020-2022)
- Grant. (Awarded). Principal Applicant. Towards Large-Scale Quantum Systems: Memristor-Based Neuromorphic Circuits for Electronic Regime Recognition & Quantum State Tomography of Silicon Qubits. Institut quantique via CFREF. Call for projects. 237 000 $. (2019-2022)
- Grant. (Awarded). Co-applicant. Low Temperature Interconnections for High Performance Heterogeneous Integration. PROMPT-Québec. Collaborative Research and Development Grant. 247 785 $. (2019-2022)
- Grant. (Awarded). Co-applicant. Operating support of "Chaine d'innovation intégré pour la prospérité numérique". Ministère de l'économie, de la science et de l'Innovation. Infrastructure support. 1 350 000 $. (2019-2022)
- Grant. (Awarded). Principal Applicant. Heteregeneous integration of high-densisty analog crossbar for advanced data processing. Natural Sciences and Engineering Research Council of Canada (NSERC). Strategic project grant. 577 000 $. (2017-2021)
- Grant. (Awarded). Co-applicant. Physical vapour deposition of ferroelectric and multiferroic tunnel junctions. Natural Sciences and Engineering Research Council of Canada (NSERC). Strategic parternership grants for projects. 601 000 $. (2017-2021)
- Grant. (Awarded). Principal Applicant. Neuromorphic Circuits for Large-Scale Quantum Systems. Institut quantique. Call for proposal. 237 000 $. (2019-2021)
- Grant. (Awarded). Co-applicant. Chaine d'innovation intégré pour la prospérité numérique. Ministère de l'économie, de la science et de l'Innovation. Infrastructure support. 20 500 000 $. (2018-2021)
- Grant. (Awarded). Principal Investigator. Développement de technologie de la microélectronique pour le calcul de haute performance pour des applications centralisées et distribuées. Mathematics of Information Technology and Complex Systems (MITACS). Centre de Collaboration MiQro Innovation. Mitacs Accélération. 550 000 $. (2016-2021)
- Grant. (Awarded). Co-applicant. Regroupement Québécois sur les Matériaux de Pointe. (2015-2021)
- Grant. (Awarded). Co-applicant. New Initiative for Quantum Information Science and Technology – NIQUIST. (2015-2020)
- Grant. (Awarded). Principal Applicant. Optical fiber hygrometer system integration. Natural Sciences and Engineering Research Council of Canada (NSERC). EGP - Engage Grants for universities. 25 000 $. (2019-2020)
- Grant. (Completed). Principal Applicant. 3D microscopy fron nanoelectronics devices to integrated systems. Natural Sciences and Engineering Research Council of Canada (NSERC). Research Tools and Instruments. 150 000 $. (2018-2020)
- Grant. (Completed). Principal Investigator. Design and fabrication of computing and memory node for Exascale super computer. Ministère du développement économique, de l'innovation et de l'exportation (MDEIE). Programme de soutien à la recherche (PSR), volet 4 : Soutien à des initiatives internationales de re. 1 250 000 $. (2016-2020)
- Grant. (Completed). Co-applicant. Modélisation et fabrication de qubits de spin extensibles basés sur la technologie UTBB FD-SOI. Fonds de recherche du Québec - Nature et technologies (FRQNT). Projet de recherche en équipe. 180 000 $. (2017-2020)
- Grant. (Completed). Co-investigator. Microelectronic platform for scalable quantum computer. University of Sherbrooke. Canada First - Research excellence fund: From quantum science to quantum engineering. 170 000 $. (2016-2019)
- Grant. (Completed). Principal Investigator. Emerging devices integration above CMOS circuit. (2014-2019)
- Grant. (Completed). Co-applicant. European Exascale Processor Memory Node Design. (2015-2019)
- Research Chair. (Completed). Principal Investigator. NSERC/IBM Industrial Research Chair in High-Performance Heterogeneous Integration. (2014-2019)
- Grant. (Completed). Co-applicant. Infrared Imager. (2013-2017)
- Research Chair. (Completed). Principal Investigator. Smarter Microelectronics Packaging for Performance Scaling. (2014-2016)
- Grant. (Completed). Principal Investigator. Développement d'un procédé de fabrication pour prototypes de capteur de gaz à nanotubes de carbone. (2015-2016)
- Grant. (Completed). Principal Investigator. Complementary Resistance Switching in nano Crossbar Arrays. (2013-2016)
- Grant. (Completed). Co-applicant. Imagerie Magnetique à haute sensibilité et haute résolution spatiale utilisant un réseau de spins dans le diamant. (2013-2016)
- Grant. (Completed). Co-investigator. NSERC CREATE training program in Integrated Sensor Systems. (2010-2016)
- Grant. (Completed). Principal Investigator. 3D heterogeneous platform with highly sensitive integrated gas sensors based on ultra-low power metal SETs circuits. (2014-2015)
- Grant. (Completed). Co-applicant. Infrastructure avancée de conception en nano/micro-électronique et mécatronique, et de capture de mouvement haute-fidélité. (2015-2015)
- Grant. (Completed). Co-applicant. Institut Interdisciplinaire d'Innovation Technologique. (2012-2015)
- Grant. (Completed). Co-investigator. Regroupement Québécois sur les Matériaux de Pointe (RQMP). (2009-2015)
- Grant. (Completed). Co-applicant. Infrastructure de Micro et Nanofabrication. (2010-2014)
- Grant. (Completed). Principal Investigator. Nanofabrication of single electron devices to support CMOS evolution in next decades.. (2009-2014)
- Contract. (Completed). Principal Investigator. Study/Improvement of IBM Semi-conductor Packaging Interconnection Process Robustness for large chips. (2011-2013)
- Grant. (Completed). Principal Investigator. Packaging single electron device integrated on CMOS technology. (2011-2013)
- Grant. (Completed). Co-investigator. Gallium nitride processes for efficient low loss power transistors. (2010-2013)
- Grant. (Completed). Principal Investigator. Nanofabrication of single electron devices to support CMOS evolution in next decades. (2010-2013)
- Grant. (Completed). Co-investigator. Single Electron Device Integration on CMOS technology. (2010-2013)
- Grant. (Completed). Co-applicant. Mapping Anti-Cancer Drugs Using Advances X-ray Microanalysis. (2011-2012)
- Grant. (Completed). Principal Investigator. Single Electron Device Integration on CMOS Technology. (2009-2012)
- Grant. (Completed). Co-applicant. Centre d'excellence en génie de l'information (CEGI). (2009-2012)
- Grant. (Completed). Co-investigator. Three dimensional aberration corrected scanning transmission electron microscopy. (2008-2011)
- Grant. (Completed). Principal Investigator. An advanced planarization tool for nanodamascene process enabling nanoelectronic circuits. (2009-2010)
- Grant. (Completed). Principal Investigator. Réalisation d'une mémoire non-volatile basée sur un piège à électron. (2007-2010)
- Grant. (Completed). Principal Investigator. Fabrication of non-volatile memory based on single electron trap. (2008-2010)
Publications
Articles de revue
- Abdelouadoud El Mesoudy, Denis Machon, Andreas Ruediger, Abdelatif Jaouad, Fabien Alibart, Serge Ecoffey, Dominique Drouin. (2023). Band gap narrowing induced by oxygen vacancies in reactively sputtered TiO2 thin films. Thin Solid Films 769 139737. (Published).
- Pierre-Antoine Mouny, Yann Beilliard, Sébastien Graveline, Marc-Antoine Roux, Abdelouadoud El Mesoudy, Raphaël Dawant, Pierre Gliech, Serge Ecoffey, Fabien Alibart, Michel Pioro-Ladrière, Dominique Drouin. (2023). Memristor-Based Cryogenic Programmable DC Sources for Scalable In Situ Quantum-Dot Control. IEEE Transactions on Electron Devices 70 (4), (Published).
- Valentin Giglia, Valerie Gauthier, Tania Hemakumara, Ravi Sundaram, Dominique Drouin, Michel Pioro-Ladriere, Sylvain Nicolay. (2023). Superconducting NbN for strong magnetic field applications: Impact of the thin films intrinsic disorder. IEEE Transactions on Applied Superconductivity 33 (2), 1-6. (Published).
- Gaspard Goupy, Alexandre Juneau-Fecteau, Nikhil Garg, Ismael Balafrej, Fabien Alibart, Luc Frechette, Dominique Drouin, Yann Beilliard. (2023). Unsupervised and efficient learning in sparsely activated convolutional spiking neural networks enabled by voltage-dependent synaptic plasticity. Neuromorphic Computing and Engineering 3 (1), (Published).
- Tony Liu, Amirali Amirsoleimani, Jianxiong Xu, Fabien Alibart, Yann Beilliard, Serge Ecoffey, Dominique Drouin, Roman Genov. (2022). CODEX: Stochastic Encoding Method to Relax Resistive Crossbar Accelerator Design Requirements. IEEE Transactions on Circuits and Systems II: Express Briefs DOI. (Published).
- Victor Yon, Amirali Amirsoleimani, Fabien Alibart, Roger G Melko, Dominique Drouin, Yann Beilliard. (2022). Exploiting non-idealities of resistive switching memories for efficient machine learning. Frontiers in Electronics 8. (Published).
- El Mesoudy A, Lamri G, Dawant R, Arias-Zapata J, Gliech P, Beilliard Y, Ecoffey S, Ruediger A, Alibart F, Drouin D. (2022). Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing. . 2022 Jan 3:111706. Microelectronic Engineering 255 111706. (Published).
- Raphaël Dawant, Robyn Seils, Serge Ecoffey, Rainer Schmid, Dominique Drouin. (2022). Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 40 (1), 012601. DOI. (Published).
- Benoît Manchon, Greta Segantini, Nicolas Baboux, Pedro Rojo Romeo, Rabei Barhoumi, Ingrid Cañero Infante, Fabien Alibart, Dominique Drouin, Bertrand Vilquin, Damien Deleruyelle. (2022). Insertion of an Ultra‐thin Interfacial Aluminium Layer for the Realisation of a Hf0.5Zr0.5O2 Ferroelectric Tunnel Junction. physica status solidi (RRL)–Rapid Research Letters (Published).
- Quentin Vandier, Hélène Frémont, Dominique Drouin. (2022). Moisture Diffusion Inside the BEOL of an FC-PBGA Package. IEEE Transactions on Components, Packaging and Manufacturing Technology 12 (11), 1740-1747. (Published).
- Raphael Dawant, Serge Ecoffey, Dominique Drouin. (2022). Multiple material stack grayscale patterning using electron-beam lithography and a single plasma etching step. Journal of Vacuum Science and Technology B 40 (6), (Published).
- Nikhil Garg, Ismael Balafrej, Terrence C Stewart, Jean Michel Portal, Marc Bocquet, Damien Querlioz, Dominique Drouin, Jean Rouat, Yann Beilliard, Fabien Alibart. (2022). Voltage-Dependent Synaptic Plasticity (VDSP): Unsupervised probabilistic Hebbian plasticity rule based on neurons membrane potential. Frontier in Neuroscience DOI. (Published).
- Abderrahim El Amrani, Étienne Paradis, David Danovitch, Dominique Drouin. (2021). A Novel Chip-join Assembly Using Heterogeneous Sn-Ag Bumps. IEEE Transactions on Components, Packaging and Manufacturing Technology (Published).
- Yoandris González, Azza Hadj Youssef, Andreas Dörfler, Rajesh Katoch, Abdelouadoud El Mesoudy, Andranik Sarkissian, Dominique Drouin, Andreas Ruediger. (2021). Competing tunneling conduction mechanisms in oxygen deficient HF0.5Zr0.5O2. Applied Physics Letters 119 (13), 132906. DOI. (Published).
- Romain Stricher, Paul Gond-Charton, Amrid Amnache, Jose Francisco Ambia Campos, Luc Frechette, Dominique Drouin, Serge Ecoffey. (2021). In Situ Doped Polysilicon (ISDP) Hydrophilic Direct Wafer Bonding for MEMS Applications. ECS Journal of Solid State Science and Technology DOI. (Published).
- Blonkowski S, Labalette M, Jeannot S, Ecoffey S, Souifi A, Drouin D. (2021). Modeling current and voltage peaks generation in complementary resistive switching devices. Solid-State Electronics (183), 108122. (Published).
- João H Quintino Palhares, Yann Beilliard, Fabien Alibart, Everton Bonturim, Daniel Z de Florio, Fabio C Fonseca, Dominique Drouin, Andre S Ferlauto. (2021). Oxygen vacancy engineering of TaO x-based resistive memories by Zr doping for improved variability and synaptic behavior. Nanotechnology 32 (40), 405202. DOI. (Published).
- Youcef A Bioud, Etienne Paradis, Abderraouf Boucherif, Dominique Drouin, Richard Arès. (2021). Shape control of cathodized germanium oxide nanoparticles. Electrochemistry Communications 122 106906. (Published).
- Tony Liu, Amirali Amirsoleimani, Fabien Alibart, Serge Ecoffey, Dominique Drouin, Roman Geno. (2020). AIDX: Adaptive Inference Scheme to MitigateState-Drift in Memristive VMM Accelerators. IEEE Transactions on Circuits and Systems II: Express Briefs (Published).
- A El Amrani, É Paradis, D Danovitch, D Drouin. (2020). A Study of Low-Cost Sequential Electroplating Bumping Process and Its Metallurgical Behavior. IEEE Transactions on Components, Packaging and Manufacturing Technology 10 (5), 917-923. (Published).
- M Merhej, S Ecoffey, B Sadani, B Lee–Sang, T Baron, S David, D Drouin, B Salem. (2020). A fabrication process for self-connected horizontal SiGe nanowires. Microelectronic Engineering 220 111150. (Published).
- Youcef Ataellah Bioud, Abderraouf Boucherif, Gilles Patriarche, Dominique Drouin, Richard Arès. (2020). Capturing the Effects of Free Surfaces on Threading Dislocation Density Reduction. ECS Transactions (Published).
- Yann Beilliard, François Paquette, Frédéric Brousseau, Serge Ecoffey, Fabien Alibart, Dominique Drouin. (2020). Conductive filament evolution dynamics revealed by cryogenic (1.5 K) multilevel switching of CMOS-compatible Al2O3/TiO2 resistive memories. Nanotechnology (Published).
- Youcef A Bioud, Maxime Rondeau, Abderraouf Boucherif, Gilles Patriarche, Dominique Drouin, Richard Arès. (2020). Effect of sintering germanium epilayers on dislocation dynamics: From theory to experimental observation. Acta Materialia (Published).
- A Amirsoleimani, F Alibart, V Yon, J Xu, M. R Pazhouhandeh, S Ecoffey, Y Beilliard, R Genov, D Drouin. (2020). In‐Memory Vector‐Matrix Multiplication in MonolithicComplementary Metal–Oxide–Semiconductor‐Memristor Integrated Circuits: DesignChoices, Challenges, and Perspectives. Advanced Intelligent Systems (Published).
- Yann Beilliard, François Paquette, Frédéric Brousseau, Serge Ecoffey, Fabien Alibart, Dominique Drouin. (2020). xInvestigation of resistive switching and transport mechanisms of Al2O3/TiO2− memristors under cryogenic conditions (1.5 K). AIP Advances 10 (2), 025305. (Published).
- A Quelennec, É Duchesne, H Frémont, D Drouin. (2019). Source Separation Using Sensor’s Frequency Response:Theory and Practice on Carbon Nanotubes Sensors. Sensors 19 (15), 3389. (Published).
- YA Bioud, A Boucherif, M Myronov, A Soltani, G Patriarche, N Braidy, D Drouin, R Arès. (2019). Uprooting defects to enable high-performance III-Vdevices on Si. Nature Communication 10 (1), 1-12. (Published).
- Youcef Ataellah Bioud, Abderraouf Boucherif, Maksym Myronov, Gilles Patriarche, Dominique Drouin, Richard Arès. (2019). Voided Ge/Si Platform to Integrate III-V Materials on Si. ECS Transactions 93 (1), 81. (Published).
- Tetsi* E, Philippot G, Bord Majek I, Aymonier C, Audet J, Lemire R, Bechou L, Drouin D. (2018). Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors. Physica Status Solidi (A) Application and Materials Science (Published).
- P Galy, P Lemieux*, J Camirand Lemyre, F Arnaud, D. Drouin and M Pioro-Ladrière. (2018). Cryogenic temperature characterization of a 28 nmFD-SOI dedicated structure for advanced CMOS and quantum technologiesco-integration. Journal of the Electron Devices Society (Published).
- C Bonafos, G Benassayag, R Cours, B Pécassou*, PV Guenery*, N Baboux, L Militaru, A Souifi, E Cossec, K Hamga*, S Ecoffey, D Drouin. (2018). Ion beam synthesis of indium-oxide nanocrystals forimprovement of oxide resistive random-access memories. Materials Research Express 5 (1), 015005. (Published).
- MN Beattie, YA Bioud*, DG Hobson, A Boucherif, CE Valdivia, D Drouin, R Ares, K Hinzer. (2018). Tunable conductivity in mesoporous germanium. Nanotechnology 29 (21), 215701. (Published).
- Tesega Ayele G*, Monfray S, Ecoffey S, Boeuf F, Cloarec JP, Drouin D, Souifi A. (2018). Ultrahigh sensitive CMOS pH sensor developped in the BEOL of Standard 28 nm UTBB FDSOI. Journal of the Electron Devices Society 6 (1), 1026-1032. (Published).
- D. Drouin, G. Droulers*, M. Labalette*, B. Lee Sang*, P. Harvey-Collard*, A. Souifi, S. Jeannot, S. Monfray, M. Pioro-Ladriere, and S. Ecoffey. (2017). Journal of Nanomaterials 2017 (8613571), (Published).
- M Merhej*, T Honegger, F Bassani, T Baron, D Peyrade, D Drouin, B Salem. (2017). Direct measurement of AC electrokinetics propertiesand capture frequencies of silicon and SiGe nanowires. Semiconductor Science and Technology 33 (1), 015005. (Published).
- M Labalette*, S Jeannot, S Blonkowski, S Ecoffey, A Souifi, D Drouin. (2017). Fabrication of planar back end of line compatible HfOx Complementary Resistive Switches. IEEE Transaction on Nanotechogy DOI. (Published).
- Merhej*, Mouawad and Drouin, Dominique and Salem, Bassem and Baron, Thierry and Ecoffey, Serge. (2017). Fabrication of top-down gold nanostructures using a damascene process. Microelectronic Engineering 177 41-45. (Published).
- Bioud*, Youcef A and Boucherif, Abderraouf and Belarouci, Ali and Paradis, Etienne and Fafard, Simon and Aimez, Vincent and Drouin, Dominique and Ares, Richard. (2017). Fast growth synthesis of mesoporous germanium films by high frequency bipolar electrochemical etching. Electrochimica Acta 232 422--430. (Published).
- Rahhal, Lama and Ayele, Getenet Tesega* and Monfray, Stephane and Cloarec, Jean-Pierre and Fornacciari, Benjamin and Pardoux, Eric and Chevalier, Celine and Eccofey, Serge and Drouin, Dominique and Morin, Pierre and others. (2017). High Sensitivity pH Sensing on the BEOL of Industrial FDSOI Transistors. Solid-State Electronics (Published).
- G Droulers*, S Ecoffey, M Pioro-Ladrière, D Drouin,. (2017). Metallic Single Electron Transistors: Impact of Parasitic Capacitances on Small Circuits. IEEE Trans. on Electron Devices 64 (12), 5202-5208. (Published).
- Y. A. Bioud*, A. Boucherif, A. Belarouci, E. Paradis, D. Drouin, R.Ares. (2016). Chemical composition of nanoporous layer formed by electrochemical etching of p-typeGaAs. Nanoscale Research Letters 11 446. (Published).
- S Chatbouri, M Troudi, N Sghaier, V Aimez, D Drouin and A Souifi,. (2016). Direct exchange between silicon nanocrystals and tunnel oxide traps under illumination on single electron photodetector. Semiconductors 50 (Published).
- Yosri Ayadi*, Lama Rahhal, Bertrand Vilquin, Céline Chevalier, Fabian Ambriz Vargas, Serge Ecoffey, Andreas Ruediger, Andranik Sarkissian, Stéphane Monfray, Jean-Pierre Cloarec, Dominique Drouin , Abdelkader Souifi. (2016). Novel concept of gas sensitivity characterization of materials suited for implementationin FET-based gas sensors. Nanoscale Research Letters 11 (1), 446. (Published).
- Bruno Lee Sang*, Marie-Josée Gour, Maxime Darnon, Serge Ecoffey, Abdelatif Jaouad, Benattou Sadani*, Dominique Drouin. (2016). Selective dry etching of TiN nanostructures over SiO2 nanotrenches using a Cl2/Ar/N2 inductively coupled plasma. Journal of Vacuum Science and Technology (JVST) (Published).
- KG. El Hajjam*, MA Bounouar*, N Baboux, S Ecoffey, M Guilmain, E Puyoo, LA Francis, A Souifi, D Drouin, F Calmon. (2016). Tunnel junction engineering for optimized Metallic Single Electron Transistor. IEEE Transactions on Electron Devices (Published).
- Sang*, Bruno Lee and Gour, Marie-Josee and Jaouad, Abdelatif and Ecoffey, Serge and Darnon, Maxime and Sadani*, Benattou and Souifi, Abdelkader and Drouin, Dominique. (2015). Inductively coupled plasma etching of ultra-shallow Si 3 N 4 nanostructures using SF6/C4F8 chemistry. Microelectronic Engineering 141 68-71. (Published).
- Mahvash, Farzaneh and Paradis, Etienne and Drouin, Dominique and Szkopek, Thomas and Siaj, Mohamed. (2015). Space-charge limited transport in large-area monolayer hexagonal boron nitride. Nano letters 15 (4), 2263--2268. (Published).
- Diop*, Mamadou Diobet and Paquet, Marie-Claude and Danovitch, David and Drouin, Dominique. (2015). Void-Free Underfill Process With Variable Frequency Microwave for Higher Throughput in Large Flip Chip Package Application. IEEE Transactions on Device and Materials Reliability, 15 (2), 250-257. (Published).
- P Harvey-Collard*, D Drouin, M Pioro-Ladrière. (2014). A Silicon Nanocrystal Field Effect Transistor. Applied Physic Letter 104 (19), 193505. (Published).
- El Hajjam*, Khalil and Baboux, Nicolas and Calmon, Francis and Souifi, Abdelkader and Poncelet, Olivier and Francis, Laurent A and Ecoffey, Serge and Drouin, Dominique. (2014). Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering. Journal of Vacuum Science \& Technology A 32 (1), 01A132. (Published).
- Parekh*, Rutu and Beauvais, Jacques and Drouin, Dominique. (2014). SET logic driving capability and its enhancement in 3-D integrated SET--CMOS circuit. Microelectronics Journal 45 (8), 1087--1092. (Published).
- Chatbouri, S and Troudi, M and Sghaier, N and Aimez, V and Drouin, D and Souifi, A. (2014). Traps contribution on detection time of single electron photodetector (Photo-SET). Semiconductor Science and Technology 29 (8), 085003. (Published).
- *Guilmain M , *Labbaye T , *Dellenbach F , *Nauenheim C , Drouin D , Ecoffey S. (2013). A damascene platform for controlled ultra-thin nanowire fabrication. Nanotechnology 24 (24), (Published).
- Gerbedoen JC, Aliane* A, Giguère A, Drouin D, Aimez V. (2013). All evaporation submicron lift-off lithography process with negative e-beam QSR-5 resist. Microelectronic Engineering 103 123-125. (Published).
- Bilousov OV, Geaney H, Carvajal JJ, Zubialevich VZ, Parbrook PJ, Giguere A, Drouin D, Diaz F, Aguilo M, O'Dwyer C. (2013). Fabrication of p-type porous GaN on silicon and epitaxial GaN. Applied Physics Letters 103 (11), 112103-112103-5. (Published).
- *Harvey-Collard P, Jaouad A, Drouin D, Pioro-Ladrière M. (2013). Inductively coupled plasma etching of amorphous silicon nanostructures over nanotopography using C4F8/SF6 chemistry. Microelectronic Engineering 110 408-413. (Published).
- Bilousov OV, Carvajal JJ, Drouin D, Vilalta A, Ruterana P, Pujol MC, Mateos X, Díaz F, Aguiló M, O'Dwyer C. (2013). Metal catalyzed porous n-type GaN layers: low resistivity ohmic contacting and single-step MgO/GaN diode formation. ECS Transactions 53 (2), 12-27. (Published).
- Roy-Guay D, Pioro-Ladrière M, Morris D, Tallaire A, Achard J, Drouin D. (2012). CL and photoluminescence of NV centers. International Journal of Nanoscience 11 (4), (Published).
- Carvajal JJ , Bilousov OV , Drouin D , Aguiló M , Díaz F , Rojo JC. (2012). Chemical vapor deposition of porous GaN particles on silicon. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 18 (4), (Published).
- Méndez M , Cesteros Y , Marsal LF , Giguère A , Drouin D , Salagre P , Formentín P , Pallarès J , Aguiló M , Díaz F , Carvajal JJ. (2012). Effect of thermal annealing on the kinetics of rehydroxylation of Eu3+:La2O3 nanocrystals. Inorganic chemistry 51 (11), (Published).
- Solanki A, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Pauc N. (2012). Geometrical control of photocurrent in active Si nanowire devices. Nano Energy 1 (5), 714-722. (Published).
- *Jouvet N, *Bounouar MA, *Ecoffey S, *Nauenheim C, Beaumont A, Souifi A, Calmon F, Monfray S, Ruediger A, Drouin D. (2012). Recent developments on 3d integration of metallic set onto CMOS process for memory application. International Journal of Nanoscience 11 (4), (Published).
- Bilousov OV , Carvajal JJ , Drouin D , Mateos X , Díaz F , Aguiló M , O'Dwyer C. (2012). Reduced workfunction intermetallic seed layers allow growth of porous n-GaN and low resistivity, ohmic electron transport. ACS applied materials & interfaces 4 (12), (Published).
- *Parekh R, Beaumont A, Beauvais J, Drouin D. (2012). Simulation and Design Methodology for SET/SET-CMOS Hybrid Integrated Logic at 22-nm Room Temperature Operation. IEEE Transaction on electron device 59 (4), 918-923. (Published).
- Xuan W, Beaumont A, *Guilmain M, *Bounouar MA, Baboux N, Drouin D, Calmon F. (2012). Static and Dynamic Models for Single Electron Memory. IEEE Transactions on Electron Devices 59 (1), 212-220. (Published).
- *Demers H , Ramachandra R , Drouin D , de Jonge N. (2012). The probe profile and lateral resolution of scanning transmission electron microscopy of thick specimens. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 18 (3), (Published).
- *Demers H , *Poirier-Demers N , Phillips MR , de Jonge N , Drouin D. (2012). Three-dimensional electron energy deposition modeling of cathodoluminescence emission near threading dislocations in GaN and electron-beam lithography exposure parameters for a PMMA resist. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 18 (6), (Published).
- *Guilmain M, Jaouad A, *Ecoffey S, Drouin D. (2011). SiO2 shallow nanostructures ICP etching using ZEP electroresist. Microelectronic Engineering 88 (8), 2505-2508. (Published).
- *Ayari-Kanoun A, Jaouad A, Souifi A, Drouin D, Beauvais J. (2011). Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 (5), (Published).
- *Droulers G, Beaumont A, Beauvais J, Drouin D. (2011). Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 (2), (Published).
- *Ecoffey S, *Guilmain M, Morissette JF, *Bourque F, *Pont J, *Lee Sang N, Drouin D. (2011). Technology platform for the fabrication of titanium nanostructures. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 29 (6), (Published).
- *Demers H , *Poirier-Demers N , *Couture AR , *Joly D , *Guilmain M , de Jonge N , Drouin D. (2011). Three-dimensional electron microscopy simulation with the CASINO Monte Carlo software. Scanning 33 (3), (Published).
- *Beaumont A, *Dubuc C, Beauvais J, Drouin D. (2010). Direct-write electron beam lithography in silicon dioxide at low energy. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 28 (5), 940-945. (Published).
- de Jonge N , *Poirier-Demers N , *Demers H , Peckys DB , Drouin D. (2010). Nanometer-resolution electron microscopy through micrometers-thick water layers. Ultramicroscopy 110 (9), (Published).
- M. Mendez, J. J. Carvajal, Y. Cesteros, L. F. Marsal, E. Martínez-Ferrero, A. Giguere, D. Drouin, P. Salagre, P. Formentín, J. Pallarès, M. Aguiló and F. Díaza. (2010). Photoluminescence and cathodoluminescence of Eu: La2O3 nanoparticles synthesized by several methods. Physics Procedia 8 114-120. (Published).
- *Demers H , *Poirier-Demers N , Drouin D , de Jonge N. (2010). Simulating STEM imaging of nanoparticles in micrometers-thick substrates. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 16 (6), (Published).
- Méndez M, Carvajal JJ, Cesteros Y, Aguiló M, Díaz F, Giguère A, Drouin D, Martínez-Ferrero E, Salagre P, Formentín P, Pallarès J, Marsal LF. (2010). Sol-gel Pechini synthesis and optical spectroscopy of nanocrystaline La2O3 doped with Eu3+. Optical Materials 32 (10), 1686-1692. (Published).
- *Dupuy E, Morris D, Pauc N, Aimez V, Gendry M, Drouin D. (2009). Carrier transport properties in the vicinity of single self-assembled quantum dots determined by low-voltage cathodoluminescence imaging. Applied Physic Letter 94 022113. (Published).
- *Ayari-Kanoun A, Drouin D, Beauvais J, Lysenko V, Nychyporuk T, Souifi A. (2009). Organization of silicon nanocrystals by localised electro-chemical etching. Applied Physic Letter 95 153105. (Published).
- *Beaumont A, *Dubuc C, Beauvais J, Drouin D. (2009). Room temperature single electron transistor featuring gate enhanced on-state current, Electron Device Letters. IEEE Electron Device Letters 30 766-768. (Published).
- *Dubuc C, Beauvais J, Drouin D. (2008). A nanodamascene process for advanced single-electron transistor fabrication. IEEE Transactions on Nanotechnology 7 68-73. (Published).
- *Dubuc C, *Beaumont A, Beauvais J, Drouin D. (2008). Current conduction models in high temperature single-electron transistor. Solid-State Electronic 53 478-482. (Published).
- Shaffer E, Helmy A, Drouin D, Dubowski D. (2008). Excimer laser-induced crystallization of CdSe thin films. Applied Physics A: Materials Science and Processing 93 866-874. (Published).
- Drouin D , *Couture AR , *Joly D , *Tastet X , Aimez V , Gauvin R. (2007). CASINO V2.42: a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning 29 (3), (Published).
- *Dubuc C, Beauvais J, Drouin D. (2007). Single-electron transistors with wide operating temperature range. Applied Physic Letter 90 113104. (Published).
- Genest J, Dubowski JJ, Aimez V, *Pauc N, Drouin D, Post M. (2007). UV laser controlled quantum well intermixing in InAlGaAs/GaAs heterostructures. Journal of Physics: Conference Series 59 605-609. (Published).
- Mun LK , Drouin D , Lavallée E , Beauvais J. (2004). The impact of charging on low-energy electron beam lithography. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 10 (6), (Published).
Chapitres de livre
- Amirali Amirsoleimani, Tony Liu, Fabien Alibart, Serge Eccofey, Yao-Feng Chang, Dominique Drouin, Roman Genov. (2021). Mitigating State-Drift in Memristor Crossbar Arrays for Vector Matrix Multiplication. Memristor - An Emerging Device for Post-Moore’s Computing and Applications (IntechOpen, 78752). IntechOpen. DOI. (Published).
Articles de conférence
- Hussein Hamieh, Juliano Borges, Étienne Paradis, Yann Beilliard, Serge Ecoffey, Isabel De Sousa, Martin Laliberté, Dominique Drouin. (2023). 1.65 1/4m L/S high density interconnect on organic substrate by advanced semi-additive process for HPC applications. IEEE Xplore, (Published).
- Joao Henrique Quintino Palhares, Yann Beilliard, Jury Sandrini, Franck Arnaud, Kevin Garelo, Guillaume Prenat2, Lorena Anghel, Fabien Alibart, Dominique Drouin, Philippe Galy. (2023). A tunable 28nm FD-SOI crossbar output circuit forlow power analog SNN inference with eNVM synapses. EUROSOI-ULIS 2023. (Accepted).
- R. Dawant, M.-A. Roy, J. Arias‐Zapata, D. Drouin, S. Ecoffey. (2023). Chemical Mechanical Planarization process for pillar shaped Resistive Memory Crossbars Integration. The 20th Canadian Semiconductor Science and Technology Conference. (Published).
- Shrivani Pandiya, Christophe Sansregret, Isabel De Sousa, Serge Ecoffey, Yann Beillard, Dominique Drouin. (2023). Comparison of sintering methodologies for 3D printed high-density interconnects (2.3 L/S) on organic substrates for high-performance computing applications. IEEE Explore, (Published).
- A. Ruediger, Y. Gonzalez, D. Drouin, A. Sarkissian,. (2023). Competing tunneling mechanisms in ferroelectric tunnel junctions of Hf0.5Zr0.5O2. The 20th Canadian Semiconductor Science and Technology Conference. (Published).
- Raphaël Dawant, M. Gaudreau, M.-A. Roy, M. Valdenaire, J. Arias‐Zapata, D. Drouin, S. Ecoffey. (2023). Damascene Versus Etch-Back Chemical Mechanical Planarization for Resistive Memory Crossbars Back-End-Of-Line Integration. Micro Nano Engineering. (Published).
- Juliano Borges, Maxime Darnon, Yann Beilliard, Serge Ecoffey, Isabel De Sousa, Dominique Drouin. (2023). Development of a plasma etching process of copper for the microfabrication of high-density interconnects in advanced pachaging. IEEE Xplore, (Published).
- Dorian Coffineau, Nicolas Gariépy, Raphaël Dawant, Serge Ecoffey, Fabien Alibart, Yann Beilliard, Andreas Ruediger, Dominique Drouin. (2023). Impact of Hf0.5Zr0.5O2 thickness and dimension scaling on damascene-processed ferroelectric crosspoint memories. The 20th Canadian Semiconductor Science and Technology Conference. (Published).
- Alexandre Guilbault, Dominic Lepage, Vincent Halde, Sylvain Nicolay, David Roy-Guay, Dominique Drouin, Michel Pioro-Ladrière. (2023). Integrated diamond nanostructures for quantum magnetometry. Bulletin of the American Physical Society, (Published).
- Dorian Coffineau, Nicolas Gariépy, Raphaël Dawant, Serge Ecoffey, Fabien Alibart, Yann Beilliard, Andreas Ruediger, Dominique Drouin. (2023). Investigationof endurance, retention, and partial switching in Hf0.5Zr0.5O2 ferroelectriccrosspoint memories for in-memory computing: A damascene process approach. European Materials Research Society. (Published).
- Pierre Gliech, Javier Arias-Zapata, Abdelatif Jaouad, Serge Ecoffey, Dominique Drouin. (2023). Optimization of PECVD SiOx passivation layer for TiOx memristors integration. The 20th Canadian Semiconductor Science and Technology Conference. (Published).
- Hafiz Wakas Ali, David Danovitch, Dominique Drouin, Richard Langlois, Robert Martel. (2023). Solder Joint Reliability of Fully Homogenised SAC-SnBi Low Temperature BGA Interconnections using Solid Liquid Inter-Diffusion (SLID). IEEE Xplore, (Published).
- Benoît Manchon, Greta Segantini, Pedro Rojo Romeo, Ingrid Canero Infante, Dominique Drouin, Bertrand Vilquin, Damien Deleruyelle. (2023). Study of imprint Dynamics in HZO Ferroelectric capacitors. IEEE International Symposium on Applications of Ferroelectrics. (Published).
- Nikhil Garga, Eloi Muhr, Davide Florini, Mathieu C. Faye, Raphael Dawant, Ismael Balafrej, Laura Bégon-Lours, Bert Offrein, Damien Querlioz, Marc Bocquet , Yann Beilliard, Serge Ecoffey, Jean Rouat, Jean-Michel Portal, Fabien Alibart, Dominique Drouin. (2023). Synergizing In-Memory Learning and Bio-inspired ASICs: Advancing the Future of Neuromorphic Computing. The 20th Canadian Semiconductor Science and Technology Conference. (Published).
- Franck SABATIER, Cédric DURAND, Dominique DROUIN, Michel PIORO-LADRIÈRE, Fabien NDAGIJIMANA, Philippe GALY. (2023). Technology and design study of a 3D physics-based inductor on a FDSOI CMOS technology for quantum and RF applications. EUROSOI-ULIS 2023. (Accepted).
- R. Dawant, S. Ecoffey, D. Drouin. (2022). 3D shaping of multi-layers stack using a single plasma etching step and greyscaleelectron-beam lithography. 65th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication. (Published).
- Yang Qiu, Yann Beilliard, Isabel De Sousa, Dominique Drouin. (2022). A Self-Aligned Structure based on V-groove for Accurate Silicon Bridge Placement. IEEE, 668-673. (Published).
- Pierre-Antoine Mouny, Yann Beilliard, Michel Pioro-Ladrière, Dominique Drouin. (2022). Investigation of analog characteristics of Al2O3/TiO2-x memristors at liquid helium temperature for quantum technology applications. Silicon Quantum Electronic Workshop. (Published).
- Juliano Borges, Maxime Darnon, Yann Beilliard, Dominique Drouin. (2022). Plasma Etching of Copper for the Microfabrication of High-Density Interconnects in Advanced Packaging. AVS 68th International Symposium & Exhibition. (Published).
- Victor Yon, Stefanie Czischek, Yann Beilliard, Michel Pioro-Ladrière, Gaudreau Louis, Roger Melko, Dominique Drouin. (2022). Quantum dot charge autotuning with Bayesian Neural Networks for spin qubit applications. Silicon Quantum Electronic Workshop. (Published).
- Victor Yon, Stefanie Czischek, Yann Beilliard, Michel Pioro-Ladrière, Gaudreau Louis, Roger Melko, Dominique Drouin. (2022). Robust quantum dot charge autotuning with Bayesian Neural Networks. Machine Learning in Natural Sciences: from Quantum Physics to Nanoscience and Structural Biology. (Published).
- Benoit Manchon, Dorian Coffineau, Greta Segantini, Nicolas Baboux, Pedro Rojo Romeo, Rabei Barhoumi, Ingrid Cañero Infante, Fabien Alibart, Bertrand Vilquin, Dominique Drouin, Damien Deleruyelle. (2022). Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0. 5Zr0. 5O2 Down to Deep Cryogenic Temperature 4.2 K. ISAF-PFM-ECAPD 2022. (Published).
- N Garg, I Balafrej, Y Beilliard, D Drouin, F Alibart, J Rouat. (2022). Unsupervised Learning with Ferroelectric Synapses. IEEE, (Published).
- N. Garg, I. Balafrej, Y. Beilliard, D. Drouin, F. Alibart, and J. Rouat. (2022). Voltage-Dependent Synaptic Plasticity (VDSP): Unsupervised Learning with Ferroelectric Synapses. IEEE 52nd European Solid-State Device Research Conference. (Published).
- R Dawant, S Ecoffey, R Seils, R Schmid, D Drouin. (2021). Comparison of alignment markers and method for electron-beam lithography on CMOS dies. The 64th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication-EIPBN. (Published).
- Benoit Manchon, Greta Segantini, Pedro Rojo Romeo, Nicolas Baboux, Rabei Barhoumi, F Alibart, Bertrand Vilquin, Dominique Drouin, D Deleruyelle. (2021). Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application. EMRS 2021 Fall Meeting. (Published).
- Nikhil Garg, Ismael Balafrej, Yann Beilliard, Dominique Drouin, Fabien Alibart, Jean Rouat. (2021). Signals to Spikes for Neuromorphic Regulated Reservoir Computing and EMG Hand Gesture Recognition. ACM, 1-8. (Published).
- Youcef A Bioud, Abderraouf Boucherif, Gilles Patriarche, Dominique Drouin, Richard Arès. (2020). Engineering dislocations and nanovoids for high-efficiency III–V photovoltaic cells on silicon. AIP Publishing LLC, (Published).
- P.-Y. Martinez, Y. Beilliard, M. Godard, D. Danovitch, D. Drouin, J. Charbonnier, P. Coudrain, A. Garnier, D. Lattard, P. Vivet, S. Cheramy, E. Guthmuller, C. Fuguet Tortolero, V. Mengue, J. Durupt, A. Philippe, D. Dutoit. (2020). ExaNoDe: combined integration of chiplets on activeinterposer with bare dice in a multi-chip-module for heterogeneous and scalablehigh performance compute nodes. VLSI. (Accepted).
- A El Amrani, E Paradis, D Danovitch, D Drouin. (2020). Heterogenous Bump Metallurgy Through a Sequential Plating Based Process. IEEE, (Published).
- A El Amrani, E. Paradis, D. Danovitch, D. Drouin. (2020). High Aspect Ratio Heterogenous Sn-Ag Bump Structureusing a Sequential Electroplating Process and Novel Barrier. IEEE Xplore, (Published).
- Michele Calvo, Guillaume Beaudin, Laurence Mercier-Coderre, Pauline Girault, Pedro Rojo-Romeo, Regis Orobtchouk, Romain Stricher, Stephane Monfray, Serge Ecoffey, Dominique Drouin, Frederic Boeuf, Michael Canva, Paul G Charette. (2020). Improving silicon nitride ring resonator performances on 300 mm industrial environment for point of care applications. International Society for Optics and Photonics, 1136105. (Published).
- Quentin Vandier, Julien Pezard, Hélène Fremont, Éric Duchesne, Dominique Drouin. (2020). Readout Circuit Implemented on PCB-Level for Embedded CNT Sensors. IEEE Xplore, (Published).
- Beilliard Y, Martinez PY, Philippe A, Vivet P, Drouin D. (2019). 3D-IC design solution for modular integration of chiplet over silicon interposer. European Network on High Performance and Embedded Architecture and Compilation HiPEAC 2019. (Published).
- I. Kriekouki, S. Rochette, C. Rohrbacher, J. Camirand Lemyre, M. Pioro-Ladrière, D. Drouin, M. Barragan, S. Mir, P. Galy. (2019). 28 nm UTBB FD-SOI technology for Silicon-based quantum dots and Cryo-CMOS electronics. Silicon Quantum Electronics Workshop. (Published).
- A El Amrani, E. Paradis, D. Danovitch, D. Drouin,. (2019). Ag Diffusion Control Through Sn on aSequential Plating-Based Bumping Process. IEEE Xplore, (Published).
- YA Bioud, MN Beattie, A Boucherif, M Jellit, R Stricher, S Ecoffey, G Patriarche, D Troadec, A Soltani, N Braidy, M Wilkins, C E Valdivia, K Hinzer, D Drouin, R Arès. (2019). A porous Ge/Si interface layer for defect-free III-Vmulti-junction solar cells on silicon”, , 10913, Fev 2019. PROCEEDINGS OF SPIE, (Published).
- Y Beilliard, F Paquette, F Brousseau, S Ecoffey, F Alibart, D Drouin. (2019). Evidence of Normal-Isolant-Superconducting TunnelJunction in TiN/TiO2/Pt Memristors,Oct 2019. Silicon Quantum Electronics Workshop. (Published).
- YA Bioud, A Boucherif, M Jellit, A Soltani, GJ Patriarche, D Drouin, R Ares. (2019). Ge/Si Virtual Substratefor III-V multi-junction solar cells. PROCEEDINGS OF SPIE, (Published).
- C Rohrbacher, S Rochette, RH Foote, A Bédard-Vallée, P Galy, F. Arnaud, T. Bedecarrats, D Drouin, M Pioro-Ladrière. (2019). High-resolution cryogenic capacitance measurements of FD-SOI structures using a capacitance bridge. Silicon Quantum Electronics Workshop. (Published).
- J Moussodji, O Chacon, F Santerre, D Drouin,. (2019). Laser Grooving of multi stack materialModeling: Implementation of a high accuracy tool for laser-grooving and dicingapplication. International Society for Optics and Photonics, (Published).
- J Moussodji, O Chacon, F Santerre, D Drouin,. (2019). Multi-physics modelling and ExperimentalInvestigation – An original approach for Laser-dicing/grooving processoptimization. IEEE Xplore, (Published).
- Y Beilliard, F Paquette, F Brousseau, S Ecoffey, F Alibart, D Drouin. (2019). Observation of Highly Nonlinear Resistive Switching of TiO2-basedMemristors at Ultra-low Temperature (1.5 K). IEEE Xplore, (Published).
- A Elshear, R Stricher, S Ecoffey, M Darnon, D Drouin,. (2019). Patterning Platinum using BEOL industrially compatible processes; Chemical Mechanical Polishing vs. ICP Plasma etching, , Sept 2019. 44th International Conference on Micro and Nanoengineering. (Published).
- R Stricher, A Elshear, D Drouin, S Ecoffey. (2019). Pt and Au Planarization for the Fabrication of Micro- and Nano-Structures. 23rd International Symposium On CMP. (Published).
- I Kriekouki, J Camirand Lemyre, Sophie Rochette, Claude Rohrbacher, D Drouin, Manuel J Barragan, Salvador Mir, Philippe Galy, M Pioro-Ladrière. (2019). UTBB FD-SOI Technology for Silicon-based Quantum Dots and Cryo-CMOS Electronics. Silicon Quantum Electronics Workshop (SIQEW 2019). (Published).
- C Rohrbacher, S Rochette, J Camirand Lemyre, A Bédard-Vallée, P Lemieux, P Galy, T Bedecarrats, F Arnaud, D Drouin, M Pioro-Ladriere. (2019). Ultra-thin body buriedoxide 28nm FD-SOI platform for silicon quantum dots. Bulletin of the American Physical Society. (Published).
- V Lafage*, Y Beilliard, A Sridhar, T Brunschwiler, D Drouin. (2018). 2D magnetic inductors for DC-DC converters on glass interposer. IEEE Explore, (Published).
- Beilliard Y*, Martinez PY, Philippe A, Vivet P, Drouin D. (2018). 3D-IC design solution for modular integration of chiplet over silicon interposer. European Network on High Performance and Embedded Architecture and Compilation HiPEAC. (Published).
- YA Bioud*, A Boucherif, E Paradis, A Soltani, D Drouin and R. Arès,. (2018). Defect-free,hetero-epitaxy through electrochemical etching of germanium for multijunctionsolar cells applications. The 11th Porous Semiconductors - Science and Technology. (Published).
- V Lafage*, Y Beilliard, A Sridhar, T Brunschwiler, D Drouin. (2018). Fabrication of 2D and 3D inductors for DC-DC converters integrated on glass interposer. IEEE Explore, 1-8. (Published).
- E. Tetsi*, I. Bord Majek, G. Philippot, C. Aymonier, R. Lemire, J. Audet, L. Béchou, D Drouin. (2018). Fabrication of high capacitance density capacitor using spray coated Ba0.6Sr0.4TiO3 thin films. IEEE Explore, (Published).
- YA Bioud*, A Boucherif, M Myronov, A Soltani, G Patriarche, N Braidy, D Drouin, R Arès. (2018). High-quality Ge/Si virtual substrates fabricated by a low cost and scalable process. The 9th International SiGe Technology and Device Meeting (ISTDM) and the 11th International Conference on Silicon Epitaxy and Heterostructures (ICSI). (Published).
- Getenet-Tesega A*, Monfray S, Boeuf F, Cloarec JP, Ecoffey S, Drouin D, Souifi A. (2018). Highly Performant Integrated pH-Sensor Using the Gate Protection Diode in the BEOL of Industrial FDSOI. 2018 IEEE International Electron Devices Meeting. (Accepted).
- A. El Amrani*, E. Paradis, D. Danovitch, D. Drouin. (2018). Investigation of a Low-Cost Sequential Plating Based Process for Pb-free Bumping. 6th Electronics System-Integration Technology Conference. (Published).
- Bioud* Y A, Boucherif A, Paradis E, Soltani A, Drouin D, Arès R. (2018). Low cost Ge/Si virtual substrate through dislocation trapping by nanovoids. arXiv, (Published).
- C Valdivia, MN Beattie, YA Bioud*, DG Hobson, A Boucherif, D Drouin, R Arès, K Hinzer. (2018). Mesoporous Germanium for High Efficiency Photovoltaic Cells. The 42nd International Conference & Exposition on Advanced Ceramics & Composites (ICACC). (Published).
- MN Beattie, YA Bioud*, A Boucherif, D Drouin, R Arès, CE Valdivia, K Hinzer. (2018). Multi-Junction Solar Cells on Si Substrates with a Voided Ge Interface Layer: Effect of Substrate Doping on Simulated CellPerformance. The 7th edition of the World Conference on Photovoltaic Energy Conversion (WCPEC-7): the 45th IEEE PVSC, the 28th PVSEC and the 34th EU PVSEC. (Published).
- M Godard*, M Darnon, S Martel, C Fortin, D Drouin. (2018). Plasma treatment for fluxless flip-chip chip-joining process. IEEE Explore, (Published).
- A Quelennec*, Y Ayadi, Q Vendier, E Duchesne, H Frémont, D Drouin. (2018). Smart Packaging –Microscopic temperature and moisture sensors embedded in a flip-chip package. IEEE Explore, (Published).
- E. Tetsi*, G. Philippot, I. Bord Majeka, C. Aymonier, J. Audet, R. Lemire, L. Béchou, D. Drouin. (2018). Spray coating of Ba(Sr)TiO3 nanoparticles: a low?cost and scalable process for thin dielectric films. Micro Nano Engineering. (Published).
- A Maalaoui*, M Frenea-Robin, J Genest, S Ecoffey, J Beauvais, P Charette, D Drouin, JP Cloarec. (2018). Towards miniaturized pH sensor based on carbon nanotubes assembled by DEP on titanium electrodes. IEEE International Conference on Industrial Technology. (Published).
- GT Ayele*, S Monfray, S Ecoffey, F Boeuf, R Bon, JP Cloarec, D Drouin, A Souifi. (2018). Ultrahigh-Sensitive and CMOS Compatible ISFET Developed in BEOL of Industrial UTBB FDSOI. IEEE Explore, (Published).
- Getenet Tesega* Ayele, Stephane Monfray, Frederic Boeuf, Jean-Pierre Cloarec, Serge Ecoffey, Dominique Drouin, Etienne Puyoo, Abdelkader Souif. (2017). Development of ultrasensitive extended-gate Ion-sensitive-field-effect-transistor based on industrial UTBB FDSOI transistor. IEEE Explore, 264-267. (Published).
- MN Beattie, Y Bioud*, A Boucherif, D Hobson, R Ares, D Drouin, C Valdivia, K Hinzer. (2017). Electrical Resistivity of Mesoporous and Quasi-Monocrystalline Germanium. MRS Spring Meeting. (Published).
- M Labalette*, BenAssayag G, Bonafos C, Pecassou B, Ecoffey S, Souifi A, Drouin D. (2017). Innovative OxRam nanomemories with indium oxide nanocrystals fabricated by ultra low energy ion implantation. European Materials Research Society - EMRS. (Published).
- YA Bioud*, A Boucherif, D Drouin, R Arès. (2017). Low cost Ge/Si virtual substrate engineering for III-V multi-junction solar cell. The 13th International Conference on Concentrator Photovoltaics (CPV-13). (Published).
- Rigo A, Pinto C, Pouget K, Raho D, Dutoit D, Martinez P.-Y, Doran C, Benini L, Mavroidis I, Marazakis M, Bartsch V, Lonsdale G, Pop A, Goodacre J, Colliot A, Carpenter P, Radojkovi? P, Pleiter D, Drouin D, De Dinechin, B.D. (2017). Paving the way towards a highly energy efficient and highly integrated compute node for the exascale revolution : the ExaNoDe approach. 20th Euromicro Conference on Digital System Design, DSD 2017. 486-493. (Published).
- MN Beattie, DG Hobson, CE Valdivia, K Hinzer, YA Bioud*, A Boucherif, D Drouin, R Arès. (2017). Quasi-monocrystalline Geas an interface layer for multi-junction solar cells on Si substrates:Electrical resistivity and device modelling. IEEE Explore, (Published).
- Quelennec*, A and Shafique, U and Duchesne, E and Fremont, H and Drouin, D. (2017). Sensitive Humidity Sensor Integrated to a Flip-Chip Package for Moisture Detection in Electronics Package. Minapad. (Published).
- Quelennec*, Aurore, Shafique, Umar, Duchesne, Eric, Fremont, Helene and Drouin, Dominique. (2017). Smart Packaging: A Micro-Sensor Array Integrated to a Flip-Chip Package to Investigate the Effect of Humidity in Microelectronics Package. IEEE Explore, 513-519. (Published).
- M.Merhej*, D. Drouin, B Salem, S. Ecoffey. (2016). A damascene process for gold micro- and nano- structures. Micro-Nano Engineering. (Published).
- G Droulers*, S Ecoffey, M Pioro-Ladrière, D Drouin. (2016). A deep understanding of nanometer scale dielectric junctions for the fabrication of low power nanoelectronic devices. Google books, (Published).
- G Droulers*, S Ecoffey, M Pioro-Ladrière, D Drouin. (2016). A manufacturable process for single electron charge detection, a step towards quantum computing. IEEE Explore, (Published).
- E. Tetsi*, G. Philippot, I. Bord Majek, C. Aymonier, J. Audet, L. Béchou, D. Drouin. (2016). BaSrTiO nanoparticles dispersion for 3D integration of decoupling capacitors on glass interposer. IEEE Explore, (Published).
- B Lee Sang*, S Ecoffey, D Drouin. (2016). CMOS BEOL compatible process for the fabrication of single electron transistors, using TiN/Al2O3/TiN junctions. Micro-Nano Engineering. (Published).
- A.Y. Bioud*, A. Boucherif, A. Belarouci, E. Paradis, D. Drouin, R. Ares. (2016). Chemical composition of anodically formed p-typeporous gaas in hf-based electrolyte. Porous Semiconductors - Science and Technology. (Published).
- KG. El Hajjam*, MA Bounouar*, D Drouin, F Calmon. (2016). Enhancing Electrical Performances of Metallic DG-SET based Circuits by Tunnel Junction Engineering. 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon. (Published).
- Marina Labalette*, Serge Ecoffey, Simon Jeannot, Abdelkader Souifi, Dominique Drouin. (2016). HfOx complementary resistive switches. IEEE Explore, (Published).
- A.Y. Bioud*, A. Boucherif, A. Belarouci, E. Paradis, D. Drouin, R. Ares. (2016). Mesoporous germanium by high frequency bipolar electrochemical etching for optical sensor applications. Porous Semiconductors - Science and Technology. (Published).
- M. Labalette*, S. Ecoffey, S. Blonkowski, S. Jeannot, A. Souifi, D. Drouin. (2016). Planar HfOx based ReRAM using nanodamascene process. 13th International congress on nanostructured material. (Published).
- Drouin, D and Droulers*, G and Labalette*, M and Pioro-Ladriere, M and Souifi, A and Ecoffey, S and others. (2015). 3D microelectronic with BEOL compatible devices. VLSI Test Symposium (VTS), 2015 IEEE 33rd, 1--1. (Published).
- Bruno Lee Sang*, Khalil El Hajjam*, Yosri Ayadi*, Serge Ecoffey, Benattou Sadani*, Abdelkader Souifi, Dominique Drouin. (2015). Integration of metallic single electron transistors onCMOS substrate. 17th Canadian Semiconductor Science and Technology Conference. (Published).
- Gabriel Droulers*, Serge Ecoffey, Michel Pioro-Ladrière, Dominique Drouin. (2015). Nanodamascene Quantum-Dot Cellular Automata: Design and Fabrication with aprocess. 41st Micro and Nano Engineering. (Published).
- Yosri Ayadi*, Lama Rahhal, Bertrand Vilquin, Céline Chevalier, Fabian Ambriz Vargas, Serge Ecoffey, Andreas Ruediger, Andranik Sarkissian, Stéphane Monfray, Jean-Pierre Cloarec, Dominique Drouin , Abdelkader Souifi. (2015). Novel concept of gas sensitivity characterization of materials suited for implementation in FET-based gas sensors. 6th International Conference "Micro&Nano 2015". (Published).
- Jean-Philippe Richard*, Richard Beaudry, Yves-Alain Peter, Dominique Drouin. (2015). Plasma Treaments Involved in MEMS Die-Level Release. 17th Canadian Semiconductor Science and Technology Conference. (Published).
- M. Ionescu, Y. Ayadi*, C. Côté, S. Ecoffey, R. Nouar, S. Wolfe, D. Drouin, R. Porte, A. Sarkissian. (2015). Plasma and Vacuum Assisted Synthesis of Nanostructured Carbon Allotropes and Applications to Gas Sensors. Graphene Canada. (Published).
- PRJ Wilson*, S Landry*, L Caron, E Duchesne, and D Drouin. (2015). Strainand Humidity Response of MWCNT/Polyimide Nanocomposites for Integrated PackageReliability Sensors. 17th Canadian Semiconductor Science and Technology Conference. (Published).
- D Drouin, G Droulers*, M Labalette*, BL Sang*, P Harvey-Collard*, JP Richard*, M Pioro-Ladriere, A Souifi, S Monfray, S Ecoffey. (2015). The nanodamasceneprocess: a versatile fabrication technique for nanoelectronic applications. IEEE Nanotechnology, (Published).
- M Labalette*, S Ecoffey, D Drouin. (2015). nanodamasceneFabrication of nano planar Resistive RAMdevices using the process. 17th Canadian Semiconductor Science and Technology Conference. (Published).
- Droulers*, Gabriel and Ecoffey, Serge and Guilmain*, Marc and Souifi, Abdelkader and Pioro-Ladriere, Michel and Drouin, Dominique. (2014). Damascene planar metal-insulator-metal tunnel junctions. IEEE Explore, 884--887. (Published).
- D. Drouin. (2014). Fabrication of Nanoelectronic Device Within the Back End of Line of CMOS Devices. CMOS Emerging Technology. (Published).
- BL Sang*, A. Jaouad, M.-J. Gour, S. Ecoffey, M. Darnon, B. Sadani*, A. Souifi, D. Drouin. (2014). Inductively Coupled Plasma Etching of Ultra-Shallow Si3N4 and SiO2 Nanostructures. Micro Nano Enginnering. (Published).
- D. Drouin, S. Ecoffey, K. El Hajjam*, B.Lee Sang*, B. Sadani*, P. Harvey-Collard*, L. Valverde*, M. Labalette*, F. Calmon, A. Souifi,. (2014). Integration of nanoelectronic devices within BEOL of CMOS circuit. E-MRS 2014 FALL MEETING. (Published).
- B.L. Sang*, M-J. Gour, M. Darnon, A. Jaouad, S. Ecoffey, B. Sadani*, A. Souifi, D. Drouin. (2014). Selective Dry Etching of Titanium Nitride Nanostructures with Chlorine-Based Inductively Coupled Plasma. Micro Nano Engineering. (Published).
- Bounouar*, Mohamed Amine and Drouin, Dominique and Calmon, Francis. (2014). Towards nano-computing blocks using room temperature double-gate single electron transistors. IEEE Explore, 325--328. (Published).
- D. Drouin. (2013). 3D Integration of Nanoelectronic Devices Above CMOS. Workshop on Frontier Electronic. (Published).
- M. Diop*, M.-C. Paquet, D. Drouin. (2013). Advanced Organic Substrate Impact on the Warpage with Variable Frequency Microwave Processing of Underfill. Journal of Microelectronics and Electronic Packaging., (Published).
- *Ecoffey S, *Guilmain M, *Droulers G, *Landry S, *Nauenheim C, Ruediger A, Drouin D. (2013). Chemical mechanical planarization of titanium micro and nano-structures. 38th International Micro & Nano Engineering Conference. (Published).
- *El Hajjam K, Baboux N, Ecoffey S, Francis L, Souifi A, Calmon F, Drouin D. (2013). Crested barrier tunnel junctions using PEALD Al2O3/HfO2 stackings. Atomic Layer Deposition. (Published).
- Chatbouri S, Troudi M, Sghaier N, Kalboussi A, Drouin D, Aimez V, Souifi A. (2013). Effect of illumination on the electron transport mechanisms in Silicon nanocrystal-based nanopixels. IEEE, 1-4. (Published).
- Ecoffey S, *Guilmain M, *Nauenheim C, Drouin D. (2013). Nanometer scale titanium structures planarization. 18th International Symposium on Chemical-Mechanical Planarization. (Published).
- Ayari-Kanoun A*, Oberson V, Paquin I, Fortin C, Fontaine R, Danovitch D, Drouin D. (2013). Study of influential parameters for Lead-Free Flip chip solder joint cracking. European Microelectronics and Packaging Conference. (Published).
- Souifi A, *Jouvet N, Ecoffey S, Beaumont A, Calmon F, Monfray S, Drouin D. (2012). 3D integration of low power nanoelectronic devices above CMOS circuits. Nanoscale Science and Technology (NS&T’12). (Published).
- *Droulers G, Ecoffey S, Pioro-Ladrière M, Drouin D. (2012). Conception and fabrication of Quantum Cellular Automata based on a single electron transistor process. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- *El Hajjam K, *Bounouar MA, Baboux N, *Jouvet N, *Guilmain M, *Ecoffey S, Puyoo E, Le Berre M, *Nauenheim C, Monfray S, Souifi A, Drouin S, Calmon F. (2012). Développement d’un Filtre de Courant Thermoïonique pour l’Augmentation de la Température de Fonctionnement du SET. Journées Nanoélectronique du Club EEA. (Published).
- *Jouvet N, *Bounouar MA, Ecoffey S, *Nauenheim C, Beaumont A, Monfray S, Ruediger A, Calmon F, Souifi A, Drouin D. (2012). Développements Récents de l’Intégration 3D de SET Métalliques sur CMOS pour une Application Mémoire. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- *Harvey-Collard P, *Richard JP, *Nauenheim C, Ruediger A, Drouin D, Pioro-Ladrière M. (2012). Fabrication of Silicon Quantum Dots for Quantum Information. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- D. Drouin. (2012). Fabrication of nanoelectronic devices above CMOS. 38th International Micro & Nano Engineering Conference. (Published).
- *Nauenheim C, Moretti-Poisson M, Ecoffey S, *Lecestre A, Ruediger A, Drouin D. (2012). Fast Non-Volatile Memristive Memory on CMOS. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- *Harvey-Collard P, Jaouad A, Drouin D, Pioro-Ladrière M. (2012). ICP etching of amorphous silicon nanostructures over topography using C4F8/SF6 chemistry. 8th International Micro & Nano Engineering Conference. (Published).
- Solanki A, Pauc* N, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Magnea N. (2012). Influence of the Dielectric Environment on the Absorption Properties of Single Silicon Nanowires. EMRS Processging, (Published).
- Souifi A, Drouin D. (2012). Integration of nanoelectronic's functions in cmos back end of line. Material for Advanced Metallization, (Published).
- *Bounouar MA, Beaumont A, Calmon F, Drouin D. (2012). Metallic SET based Logic Cells: Evaluation & Comparison of Power Concumption with their CMOS Couterparts. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- *Bounouar MA, Beaumont A, Calmon F, Drouin D. (2012). Nanoelectronic Logic Cells Based on Metallic Single Electron Transistors. Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, 156-160. (Published).
- *Guilmain M, Xuan W, Morissette JF, Ecoffey S, Beaumont A, Drouin D. (2012). Non-volatile single electron memory using a floating nanogate approach. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- D. Drouin. (2012). Room-Temperature Single Electron Transistors and Their Potential Integration on CMOS. CMOS Emerging Technology. (Published).
- *Bounouar MA, Beaumont A, *El Hajjam K Calmon F, Drouin D. (2012). Room Temperature Double Gate Single Electron Transistor based Standard Cell Library. Nanoscale Architectures (NANOARCH), 2012 IEEE/ACM International Symposium on, (Published).
- *Griveau D, Ecoffey S, Parekh RM, Bounouar MA, Calmon F, Beauvais J, Drouin D. (2012). Single Electron CMOS-Like One Bit Full Adder. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- *Griveau D, Ecoffey S, *Parekh RM, *Bounouar MA, Calmon F, Beauvais J, Drouin D. (2012). Single Electron CMOS-Like One Bit Full Adder. Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, 77-80. (Published).
- Pauc* N, Solanki A, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Magnea N. (2012). Size and Dielectric Coating Induced Optical Absorption Enhancement in Silicon Nanowires. International Conference on Superlatices, Nanostructures, and Nanodevices. (Published).
- Nauenheim* C, Drouin D, Waser R, Ruediger A. (2012). Time Voltage Dependency in Resistance Switching TiO2. MRS Proceedings, mrss12-1430-e09-03. (Published).
- Ecoffey S, Morissette JF, *Guilmain M, *Nauenheim C, Drouin D. (2012). Ultrathin Titanium Passive Devices Fabrication. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Published).
- *Demers H, *Poirier-Demers N, de Jonge N, Drouin D. (2011). 3D Electron Microscopy Simulation with the CASINO Monte Carlo Software,. Microscopy and Microanalysis, (Published).
- *Poirier-Demers N, *Demers H, Drouin D, de Jonge N. (2011). Deconvolution of Simulated STEM Images of Nanoparticles in Micrometers-Thick Substrates. Microscopy and Microanalysis, (Published).
- *Droulers G, Blais S, Morissette JF, Beaumont A, Pioro-Ladriere M. and Drouin D. (2011). Ellipsometric and X-Ray Photoelectron Spectroscopy Characterization of Titanium Dioxide Thin Films Created by Oxygen Plasma. Material Research Society. (Published).
- Solanki A, Pauc N, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Magnea N. (2011). Influence of the dielectric environment in the absorption properties of single silicon nanowires. GDR Nanofils, Nanotubes, Semiconducteurs. (Published).
- *Demers H, Drouin D, de Jonge N. (2011). STEM Lateral Electron Probe Profile Calculated by Monte Carlo Simulations in Micrometers-Thick Substrates. Microscopy and Microanalysis, (Published).
- *Bounouar MA, Calmon F, Beaumont A, *Guilmain M, Xuan W, *Ecoffey S, Drouin D. (2011). Single Electron Transistor Analytical Model for Hybrid Circuit Design. New Circuits and Systems Conference (NEWCAS), 2011 IEEE 9th International, 506 - 509. (Published).
- *Ecoffey S, Morissette JF, *Guilmain M, *Bourque F, *Pont J, *Sang BL, Drouin D. (2011). Top-down approaches for the fabrication of titanium nanostructures. Proceeding of the 55th Int. conf on EIPBN, (Published).
- *Ecoffey S, Morissette JF, *Jedidi N, *Guilmain M, *Nauenheim C, Drouin D. (2011). Ultrathin Titanium Passive Devices Fabrication. Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on, 1689 - 1692. (Published).
- Sieutat C, Leclercq JL, Letartre X, Callard S, Gendry M, Grenet G, Naji K, Regreny P, Rojo-Romeo P, Viktorovitch P, Beaudin G, Cloutier M, Drouin D, Aimez V. (2010). 3D harnessing of light with photon cage. SPIE Photonics Europe. (Published).
- *Demers H, *Poirier-Demers N, de Jonge N, Drouin D. (2010). CASINO Monte Carlo Simulations of Scanning Transmission Electron Microscopy. Microscopy and Microanalysis, 258-259. (Published).
- *Dupuy E, Pauc N, Morris D, Gendry M, Drouin D. (2010). Carrier Capture Length of Single Self-Assembled Quantum Dots : Measurement and Simulation by low-voltage SEM-CL and CASINO Software. 10th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors. (Published).
- Mendez M, Marsal LF, Cesteros Y, Carvajal, JJ, Martinez-Ferrero E, Giguère A, Drouin D, Formentin P, Pallarès J, Salagre P, Aguiló M, Diaz F. (2010). Eu3+:La2O3 nanoparticles dispersed into P3HT as a down converter material for exploiting the solar spectrum. Conferencia Espanola de Nanofotónica (CEN-2010). (Published).
- Mendez M, Cesteros Y, Marsal LF, Martinez-Ferrero E, Giguère A, Drouin D, Salagre P, Formentin P, Pallarès J, Aguiló M, Diaz F, Carvajal JJ. (2010). Eu3+ doped La2O3 nanoparticles as a down converter material to improve the solar spectrum energy. European Materials Research Society 2010. (Published).
- Carvajal JJ, Mendez M, Cesteros Y, Marsal LF, Martinez-Ferrero E, Giguère A, Drouin D, Salagre P, Formentin P, Pallarès J, Aguiló M, Diaz F. (2010). Exploring the possibilities of Eu3+:La2O3 nanoparticles as an approach for down conversion processes in solar energy systems. SPIE Photonics Europe. (Published).
- *Dupuy E, Pauc N, Morris D, Gendry M, Drouin D. (2010). Low-Voltage Cathodoluminescence as a High Spatial Resolution Technique for Nanostructure Characterization. Microscopy and Microanalysis, 820-821. (Published).
- *Guilmain M, *Ecoffey S, Jaouad A, Drouin D. (2010). Nanoscale ICP etching of SiO2. 36th International Conference on Micro & Nano Engineering. (Published).
- Carvajal JJ, Mendez M, Cesteros Y, Marsal LF, Martinez-Ferrero E, Giguère A, Drouin D, Salagre P, Formentin P, Pallarès J, Aguiló M, Diaz F. (2010). Photoluminescence and cathodoluminescence of Eu : La2O3 nanoparticles synthesized by several methods. VIème rencontre franco-espagnole sur la chimie et la physique de l'état solide,. (Published).
- de Jonge DN, Ramachandra R, Northan BM, *Poirier-Demers N, Drouin D. (2010). Three-Dimensional Aberration-Corrected Scanning Transmission Electron Microscopy of Biological Specimens. Microscopy and Microanalysis, 328-329. (Published).
- Hovington P, T.-Pinard P, Lagacé M, Thibault D, Rodrigue L, Gauvin R, Drouin D. (2009). Evaluation of Strategies to Increase the Spatial Resolution of X-Ray-Mapping in the FESEM of Low Concentration in Sub-Micron microstructures. Microscopy and Microanalysis, 480. (Published).
- *Dupuy E, *Pauc N, Drouin D, Xu G, Gendry M, Morris D. (2009). High resolution imaging of InAs/InP single quantum dots by low-voltage cathodoluminescence. 2009 International Conference on Indium Phosphide & Related Materials. (Published).
- Phillips, MR, Drouin D, Moody SJ, Ton-That C. (2009). Imaging Fundamental Electronic Excitations at High Spatial Resolution Using Scanning Cathodoluminescence Microscopy. Microscopy and Microanalysis, 670. (Published).
- *Ayari-Kanoun A, Drouin D, Beauvais J, Lysenko V, Souifi A. (2009). Localized Silicon Nanocrystals on Nanopatterned Si3N4 Substrate. 2009 Materials Research Society Fall Meeting. (Published).
- Mendez M, Aguiló M, Diaz F, Carvajal JJ, Giguère A, Drouin D, Martinez-Ferrero E, Salagre P, Cesteros Y, Palacios R, Pallarès J, Marsal LF. (2009). New approaches for the synthesis of Eu3+ : La2O3nanoparticles and their spectroscopic characterization. The 2nd International Conference on Physics of Optical Materials and Devices ICOM2009. (Published).
- Mendez M, Carvajal JJ, Diaz F, Aguiló M, Giguère A, Drouin D, Martinez-Ferrero E, Salagre P, Cesteros Y, Palacios R, Pallarès J, Marsal LF. (2009). Synthesis and characterization of europium-doped La2O3 nanoparticles. TNT 2009 Trends in Nanotechnology. (Published).
- *Eugene L, Souifi A, *Incarbone L, Troudi M, Aimez V, Drouin D. (2009). Visible-range photocurrent of silicon nanocrystals in a MOS structure. NGC 2009 & CSTC 2009 Conference. (Published).
- Drouin D, *Pauc N, Phillips MR, *Poissant P, Delample V, Aimez V, Beauvais J. (2008). Characterization of nanodevices and materials using advanced SEM techniques. Microscopical Society of Canada (SMC-MSC) 2008 Annual Meeting. (Published).
- Drouin D. (2008). Characterization of semiconductor materials using Cathodoluminescence and Monte Carlo simulation. in 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies. (Published).
- Drouin D, *Demers NP, Philips MR. (2008). Development of a Simulating Tool for Cathodoluminescence Imaging of Semiconductors. 9th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors. (Published).
- Sahmuganathan V, Mi Z, Drouin D. (2008). Emission characteristics of InGaAs/GaAs quantum dot microtube ring resonators. LEOS 2008 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society. (Published).
- *Dupuy E, Xu G, Regreny P, Robach Y, Gendry M, Chauvin N, Bru-Chevallier C, Patriarche G, Morris D, Pauc N, Aimez V, Drouin D. (2008). Influence of surface reconstructions on the shape of InAs quantum dots grown on InP. IPRM 2008 - 20th International Conference. (Published).
- *Dupuy E, *Pauc N, Aimez V, Gendry M, Morris D, Drouin D. (2008). Low-Voltage Cathodoluminescence Microscopy and Spectroscopy of Diluted InAs/InP Self-Assembled Quantum Dots. IUMRS-ICEM08 | COMMAD 2008. (Published).
- Phillips MR, Drouin D, Coleman VA, Bradby JE, Jagadish C. (2008). Low voltage CL study of exciton transport in ZnO single crystals. 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies. (Published).
- Drouin D,Carvajal JJ, Aguiló M, Beaumont A, Díaz F, Rojo JC. (2008). Nanoporous GaN p-n junctions fabricated by a simple chemical vapor deposition approach. Material Research Society. (Published).
- Phillips MR, Ton-That C, Drouin D. (2008). Probing the Cathodoluminescence Properties of the ZnO:Zn Surface. IUMRS-ICEM08 | COMMAD 2008. (Published).
- McBean KE, Phillips MR, Drouin D. (2008). The Affect of the Purity of Reactants and Post-Processing Techniques on the Cathodoluminescence of ZnO Nano-Powders. IUMRS-ICEM08 | COMMAD 2008. (Published).
- Philips MR, Ton-That C, Drouin D. (2008). Ultra-Low Voltage Cathodoluminescence Study of the Green Emission in ZnO:Zn. 9th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors. (Published).
- Delample, V., Poissant, P., Baron, T., Decossas, S., Souifi, A., Drouin, D. et Beauvais, J. (2007). Fabrication and characterization of isolated single Silicon and Germanium nanocrystals using AFM nanomanipulation and sub-10nm gap electrodes. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Published).
- L. Eugène, N. Pauc, T. Baron, A. Souifi, V. Aimez, D. Drouin. (2007). Fabrication and electrical characterization of nanopillars containing silicon nanocrystals. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Published).
- *Eugene L, *Pauc N, Baron T, Souifi A, Aimez A, Drouin D. (2007). Fabrication and electrical insulation of nanopillars incorporating silicon nanocrystals for optoelectronic applications. Material Research Society. (Published).
- J.J. Carvajal, D. Drouin, Y. Gong, I. Kuskovsky. J.C. Rojo. (2007). Integration of nanoporous InGaN structures on Silicon technology. The 15th International Conference on Crystal Growth. (Published).
- E. Dupuy, N. Pauc, N. Chauvin, G. Patriarche, P. Regreny, G. Saint Girons, D. Drouin, V. Aimez, C. Bru-Chevallier, M. Gendry, D. Morris. (2007). Luminescence properties of single InAs/InP(001) quantum dots grown by solid source molecular beam epitaxy. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Published).
- M. R. Phillips, D. Drouin. (2007). Nanoscale Characterisation of Exciton and Carrier Diffusion in Wide Band Gap Semiconductors using Low Voltage Cathodoluminescence Microscopy and Spectroscopy. European Material Research Society. (Published).
- C. Dubuc, J. Beauvais and D. Drouin. (2007). Nanowire based single-electron transistor with wide operating temperature range. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Published).
- *Beaumont A, *Dubuc C, Drouin D, Beauvais J. (2007). Titanium Nanowires Interspersed With Tens of Zeptofarad Tunnel Junctions for High Density Single Electron Circuit. Material Research Society. (Published).
- A. Beaumont, C. Dubuc, D. Drouin, J. Beauvais. (2007). Towards tens of zeptofarad tunnel junctions for single-electron devices integration. 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Published).
Propriétés intellectuelles
Patents
- E Duchesne, D Drouin, H Fremont, S Landry*, A Quelennec, U. Shafique*, P Wilson. (2020). Carbon Nanotube-based multi-sensor. 10564047. United States of America. (Granted/Issued).
- Duchesne E, Drouin D, Frémont H, Landry S, Quelennec AF, Shafique U, Wilson PR. (2020). Carbon nanotube-based multi-sensor. 10739209. United States of America. (Granted/Issued).
- (2005). Fabrication of Silicide Structures by X-ray/EUV projection lithography. 6,897,140. United States of America. (Granted/Issued).
- (2005). Plasma polymerized electron beam resist. 6,855,646. United States of America. (Granted/Issued).
- (2004). Method of producing an etch-resistant polymer structure using electron beam lithography. 6,777,167. United States of America. (Granted/Issued).
- (2003). Method for using sub-micron silicide structures formed by an electron beam lithography process for the fabrication of masks for extreme ultra-violet and deep ultra-violet projection lithography. United States of America. (Granted/Issued).
- (2001). Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography. 6,261,938. United States of America. (Granted/Issued).
- (1999). Fabrication of sub-micron silicide structures on silicon using resistless electron beam lithography. Canada. (Granted/Issued).
- A El Amrani, É Paradis, D Danovitch, D Drouin. Heterogeneous solder bump structure. Canada. (Pending).
Autres contributions
Cours enseignés
- Technologies et procédés de micro et nanofabrication. GEI729. (3CR).
Gestion d'évènements
- Conference co-chair. (2022) Silicon Quantum Electronic Workshop - 2022. (Conference).
- Organizing committee. (2022) Lab2Fab - CMC Microsystem. (Conference).
Activités de collaboration internationale
- Hélène Frémont (IMS Bordeaux). France. Prof Frémont as developed an extensive expertise on microelectronics package reliability and modeling. She is currently co-supervising A. Guedon who is working on thermal sensors integration within a microelectronic package.
- Philippe Galy (ST Microelectronics). France. This industrial collaboration with P. Galy from ST Microelectronics included scholarship for PhD students, providing access to 28 nm FDSOI dedicated circuit, and expertise on design rules/CAD. P. Galy is responsible of disruptive technologies such as quantum quantum computing and neuromorphic applications. This collaboration is part of the joint laboratory between UdeS and STM.
- Bert Offrein (IBM Research Zurich). Switzerland. A collaboration with Dr. Bert has been established to integrate ferroelectric analog memories on an application specific integrated circuit for spiking neural network demonstrations.
- Damien Quelioz. France. In collaboration with Prof. Querlioz, a predictive model for oxRAM memristors has been developed. This compact model is used in modeling of neural network systems.
- Prof Jean-Michel Portal (IM2P). France. In collaboration with Prof Portal, an application-specific integrated circuit has been designed for the demonstration of spiking neural network based on TiOx memristor.
- Stéphane Monfray (ST Microelectronics) France. France. This industrial collaboration with S. Monfray from ST Microelectronics included scholarship for PhD students, providing state-of-the-art CMOS technology through wafers supplies, in depth expertise on advance transistor technology and supporting grant application. The outcome of this collaboration as lead to multiple publications, the inclusion in a European FP7 proposal and the creation at Sherbrooke of a joint laboratory between UdeS and STM.
- Jean-Pierre Cloarec (Ecole Centrale Lyon). France. Prof. Cloarec is an expert on bio sensing and surface functionalization. We currently cosupervised a PhD student (A. Maalaoui) who is developing carbon nanotube gas sensors integrated on CMOS chips.
- Abdelakder Souifi (INSA-Lyon) France. France. This collaboration enable me to thoroughly electrically characterized the nanoelectronic device developed within my laboratory. His expertise on electron transport in semiconductors materials has allowed me to improve the devices fabrication process. We have co-supervised and cotutelle PhD students (N. jouvet, Y. Ayadi, M. Labalette, G. Tesega), joint grants and publications.
- Pierre-Yves Martinez (CEA LETI). France. In collaboration with the LETI, we are developing a computing node fully integrated in a 3D microelectronic module. Dr. Martinez is the leader of the work package dedicated to the design and assembly of this module. This collaboration take place within the H2020 European Exanode project.
- Thomas Brunschwiler (IBM zurich). Switzerland. Dr. Brunschwiler is involved in the direction of the PhD student V. Lagage and postdoc Y. Beilliard who are working on 2D and 3D high performance inductor for DC/DC converter integration in a assemble microelectornics module. This project is support by H2020 Cariecool project and the IBM/NSERC chair.
- Bassem Salem (LTM Grenoble). France. Dr. Salem is an expert on Si-Si/Ge nanowire field effect transistor. He currently cosupervised Mouawad Merhej who is working on planar silicon nanowire integrated on CMOS chips.
- Laurent Bechou (IMS Bordeaux). France. Prof Bechou cosupervised the student Emmanuel Tetsi who is working on the integration of decoupling capacitor in 3D microelectronics package. His expertise on microelectronic package reliability and on high-k nanoparticles synthesis is well adapted for this project.
- Gerard Benassayag (CEMES/CNRS) France. France. With this expert on low energy ion implantation, I have proposed a self-align process for positioning nanocrystals between metal electrodes based on the nanodamascene process develop at Sherbrooke. We have supervised during summer 2013 an undergraduate student who has elaborated a proof of concept for this process. This process is essential for the proposed program.
- Laurent Francis (Universite Catholique de Louvain) Belgium. Belgium. In collaboration with Dr. Francis, I have investigated the use of atomic layer deposition (ALD) technique for the fabrication of single electron transistor using the nanodamascene process. From 2011 to 2013, we had a joint grant allowing my students to spend extended leave in Dr Francis laboratory's in Belgium. These exchanges allowed us to develop transistor with enhanced performance. This research program on Si tunnel transistor will benefit from this collaboration through access to high-quality dielectric deposition by ALD.
- Francis Calmon (INSA Lyon). France. He was the leader of the French part of the joint project Single Electron Device above CMOS. This 3 years project was supported by the Agence Nationale de la Recherche in France and NSERC in Canada. As the PI of this international collaboration, I was responsible of the scientific activities as well as the funds. The collaboration with F. Calmon included cotutelle of PhD students, joint publication and research grants.
- Eric Silver (Harvard-Smithsonian Center For Astrophysics) and Jeff Beeman (Berkely). United States of America. Within this collaboration my contribution is on the fabrication of Germanium based microcalorimeters. Such device is made of three components: an absorber, a thermometer and a weak thermal link. The absorber is thick enough to stop most of the X-rays in the energy range of interest, but must have the lowest specific heat capacity, at cryogenic temperature, to allow a larger temperature rise, proportional to the deposited photon energy. This project is supported by the National Institute of Health.
- Nield de Jonge (Vanderbilt University). United States of America. Monte Carlo modeling of scanning transmission electron microscopy. Simulations of STEM of nanoparticles in water layers that are consistent with experimental results. Calculate the resolution of Liquid STEM for various three-dimensional sample configurations including various types of nanoparticles. These research was supported by the National Institute of Health.
Présentations
- G. Droulers*, M. Labalette*, M. Pioro-Ladrière, S. Ecoffey. (2015). Monolitic 3D Integration of Nanoelectronics Device. 9th NAMIS International Summer School - Nano and Micro Systems. Montreal, Canada
- G. Droulers*, M. Labalette*, B.L. Sang*, Y. Ayadi*, A. Souifi, M. Piroro-Ladriere, S. Ecoffey. (2015). Nanofabrication et integration 3D: La procédé Nanodamascene. Entretiens Jacques Cartier - Objets connectés. Lyon, France
- D. Danovitch, J. Sylvestre. (2014). Collaboration Perspectives<?>Advanced Packaging and Embedded Systems. CMC/C2MI/ITAC joint Symposium. Ottawa, Canada
- (2013). Dispositifs Nanoelectroniques pour une Integration 3D sur Circuit CMOS. Nanosciences fondation. Grenoble, France
- D. Drouin, S. Ecoffe, C. Nauenheim*, M. Guilmain*, G. Droulers*, D. Griveau*, M. A. Bounouar*, N. Jouvet*, A. Ruediger, F. Calmon, S. Monfray, A. Souifi. (2012). Room-Temperature Single Electron Transistors and Their Potential Integration on CMOS. Summer School Regroupement Québécois Matériaux de Pointes. Orford, Canada
- D. Drouin, M. A. Bounouar*, G. Droulers*, M. Guilmain*, D. Griveau*, N. Jouvet*, J.P. Richard*, S. Ecoffey*, A. Lecestres*, C. Nauenheim*, A. Ruediger, S. Monfray, S. Charlebois, M. Pioro-Ladriere, F. (2012). Vers les nanodispositifs ultra-basse consommation sur CMOS. Entretiens Jacques-Cartier. Lyon, France
- M. Guilmain, R. Parekh, M. Amine Bounouar, S. Ecoffey, F. Calmon, D. Drouin. (2011). Intégration de dispositifs nanoélectroniques innovants sur circuits CMOS. Winter School on Design Technologies for Heterogeneous Embedded Systems. Quebec, Canada
- Drouin D, Albertini D, Baboux N, Beauvais J, Beaumont A, Bourbonnais B, Calmon F, Charlebois S, Chaker M, Ecoffey S, Gautier B, Guilmain M, Morissette JF, Parekh R, Souifi A, Xuan W. (2009). Integration of monoelectronic component with CMOS technology. 22e Entretiens » du Centre Jacques Cartier. Lyon, France
- Drouin D, Albertini D, Baboux N, Beauvais J, Beaumont A, Bourbonnais B, Calmon F, Charlebois S, Chaker M, Ecoffey S, Gautier B, Guilmain M, Morissette JF, Parekh R, Souifi A, Xuan W. (2009). Nanofabrication de transistors monoélectropnique intégrés à la technologie CMPS. Grande conerence du regroupement québécois sur les matériaux de pointes. Sherbrooke, Canada